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3 Product and Functional Description | 3.3 Detectors ZEISS
3.3.2 Detectors Overview
The beam scans the specimen and initiates particles to be emitted. A detector collects the emis-
sion and produces an electric signal with an amplitude proportional to the number of particles at
any given time.
Standard Detectors Detected Signals Typical Application
SE Detector [
}
33]
Everhart-Thornley type
SE2 Topography
Surface structure
Compositional contrast
Optional Detectors Detected Signals Typical Application
VPSE Detector [
}
39]
on VP systems only
SE2 Variable pressure
Topography and surface
structure in VP mode
C2D Detector [
}
42]
on VP systems only
Measures the current that re-
sults from the ionization of
gas by SEs Variable pressure
Topography and surface
structure in VP mode
C2DX Detector
on VP systems only
Measures the current that re-
sults from the ionization of
gas by SEs Extended pressure
Imaging of biological speci-
mens in a fully hydrated form
BSD Detector (HDBSD, BSD1)
[
}
43]
BSE Topography (crystal orienta-
tion)
Compositional contrast
YAG BSD Detector BSE Compositional contrast
STEM Detector [
}
45]
Scanning Transmission Elec-
tron Microscopy detector
Transmitted electrons Transmission imaging of ul-
trathin sections in biological
and mineralogical examina-
tions
CL Detector [
}
46]
Cathodoluminscence detec-
tor
Light photons Mineralogy
Specimen current detector
(SCD) Absorbed electrons Electron beam induced cur-
rent (EBIC)
Wavelength dispersive X-ray
detector (WDX) X-ray Materials elemental composi-
tion evaluation
Energy dispersive X-ray de-
tector (EDX) X-ray Materials elemental composi-
tion evaluation
For more details, refer to the document Product Specification of the microscope.
32 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006