7 Troubleshooting | 7.2 Column
ZEISS
7.2.2.1 Preparing Filament Exchange
The preparations for filament exchange are the same for all filament types.
This procedure consists of the following steps:
1.
Venting the Gun and the Specimen Chamber [
2.
De-energizing the Microscope [
3.
4.
Disassembling the Firing Unit [
5.
6.
7.2.2.1.1 Venting the Gun and the Specimen Chamber
In order to replace the filament, you need to disassemble the gun. Before you can disassemble the
gun, you need to prepare the microscope: You need to switch off the gun and to vent the micro-
scope. In SmartSEM, you need to select the filament type that you want to install.
Prerequisite
ü
The vacuum system is operating.
Procedure
1. In the SEM Controls panel, select the
Gun Vacuum
tab.
2. Click
Vent Gun
.
à
The
Vent Gun
window is displayed.
3. Click
Yes
to completely vent the system.
4. In the
Gun
tab, select the correct
Filament Type
.
5. Activate the
New Filament
checkbox.
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Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Содержание EVO
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