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3 Product and Functional Description | 3.4 Specimen Stage ZEISS
Info
It is highly recommended that the CCD illumination control is set to Auto Detect . This avoids
any problems by the user forgetting to switch the illumination back for a different detector.
Fig. 23: Chamber CCD camera disabled as indicated by a pause sign (e.g. if a diode detector is
selected).
3.4 Specimen Stage
Purpose The 5-axes motorized Cartesian specimen stage is used to navigate the specimen inside the speci-
men chamber.
Position The specimen stage is mounted on the chamber door. If the chamber door is closed, the speci-
men stage is inside of the specimen chamber.
2
1 1
2
Fig. 24: Specimen stage with dovetail fitting for precise fitting
1 Specimen holder 2 Specimen stage
Function The stage can be operated using the dual joystick or using the SmartSEM software.
Axis Description Movement
X X-axis Movement towards or away from the cham-
ber door (horizontal movement in the image)
Y Y-axis Movement to the left or right seen from the
chamber door (horizontal movement in the
image)
Z Height Vertical movement (movement towards or
away from the focal plane of the image)
38 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006