Zeiss EVO, Инструкция по эксплуатации, Страница: 89 / 180

ZEISS 5 First Operating Steps | 5.6 Finding Appropriate Detector Settings
à
The Sample Holder Gallery dialog is displayed.
On the left hand side, a list of icons represents the specimen holders.
4. In the Sample Holder Gallery dialog, select the installed beam deceleration specimen
holder, e.g. Stage Bias 9 Stub .
5. Activate the Is Available checkbox.
6. Close the Sample Holder Gallery dialog.
7. Close the Stage Navigation Settings dialog.
8. From the Panel Configuration Bar , select Variable Stage Bias .
à
The Variable Stage Bias window is displayed.
9. Activate the Beam deceleration carousel checkbox.
10. Activate the Beam deceleration checkbox.
à
The Beam deceleration volts scroll bar be-
comes available.
11. Use the Beam deceleration volts scroll bar to adjust the stage bias potential until you are
satisfied with the results.
5.6.7.2 Setting up the Stage Bias Low Voltage
Stage biasing can also be used for applying low voltages in the range of +20 V to −20 V to speci-
mens. This low-voltage specimen biasing is normally used in combination with the SE detector
and enables you to achieve an improvement in the image contrast.
Low-voltage specimen biasing can be applied under HV and VP conditions.
Info
Low-voltage biasing works with any standard, conducting, dovetail mounted specimen holder.
It does not work with lens-mounted specimen holders and other non-dovetail mountings.
If the Beam deceleration carousel checkbox is fitted and activated in SmartSEM, only high-
voltage beam deceleration can be used and low-voltage biasing is disabled.
CAUTION
Risk of electrical shock by stage on bias voltage
If you open the chamber door while the stage is still on bias voltage, then contact may cause
electrical shock.
4
Always switch off the beam deceleration before you open the chamber door.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 89