Zeiss EVO, Инструкция по эксплуатации, Страница: 66 / 180

5 First Operating Steps | 5.4 Acquiring an Image ZEISS
NOTICE
Contamination caused by fingerprints
Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping
times.
4
Always wear lint-free gloves when touching the specimen, specimen holder, or stage.
Procedure 1. Take hold of the recessed grip.
2. Carefully open the chamber door.
3. If a specimen holder is mounted onto the specimen stage, remove it by sliding it out of the
dovetail rails.
4. Install the prepared specimen holder by sliding
it into the dovetail rails.
Make sure that the dovetail is placed in the cor-
rect orientation so that the flat side of the
dovetail of the specimen holder is flush with
the milled edge of the specimen stage.
5. Check the chamber view to ensure the specimen does not hit any components when it is
introduced into the specimen chamber.
6. Carefully close the chamber door.
à
The specimen holder and the specimen inside the chamber are visible in the Image
Area .
5.4.2.5 Evacuating the Specimen Chamber
Procedure
1. In the SEM Controls panel, select the Vacuum tab.
2. Click Pump .
à
Several vacuum status messages display the current vacuum levels.
à INFO: A change macro is also available which automates the specimen change proce-
dure and prompts the user to carry out specific actions. The final steps of the macro runs
up the electron beam ready for the user to start imaging.
66 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006