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ZEISS
7 Troubleshooting | 7.1 Chamber
Prerequisite
ü
Requires the
Supervisor
privilege.
Procedure
1. From the Windows start menu, select
SmartSEM > SmartSEM Administrator
.
à
The
SmartSEM Administrator Log on
window is displayed.
2. Enter user name and password.
3. To confirm, click
OK
.
à
The
SmartSEM Administrator
window is displayed showing the user list.
4. Click
Column/Stage
.
5. In the
Stage Options
section, double-click the
Joystick TV Angle
input field.
6. Enter an angle depending on the installation lo-
cation of the CCD camera.
If the CCD camera is installed at the front, enter
0°
.
If the CCD camera is installed at the side, enter
90°
.
7.1.4 Resetting the Touch Alarm
To prevent damage, a touch alarm is integrated in the microscope. If the specimen or the speci-
men holder touches the chamber walls, the detectors, or the objective lens, the stage is stopped
immediately. An audible warning sounds and an on-screen message is displayed.
Prerequisite
ü
The EM server shows the message
WARNING Stage Touching
.
Procedure
1. To accept the warning, click
OK
.
2. Move the stage in the reverse direction away from the touch.
7.1.5 Checking the Temperature
Procedure
1. In the
Panel Configuration Bar
, double-click
Water Flow/Temperature
.
à
The
Water Flow/Temperature
panel is displayed.
2. Check the entries.
à
If a value is critical, it is displayed in red.
7.1.6 Replacing the Chamber Door Seal
Possible reasons for replacing the chamber door seal are the following:
§
Chamber door does not close tightly
§
Bad chamber vacuum
This procedure consists of the following steps:
1.
Venting the Specimen Chamber [
2.
3.
Evacuating the Specimen Chamber [
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
117
Содержание EVO
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