
ZEISS
2 Safety | 2.3 Prevention of Hazards
2.3 Prevention of Hazards
This section summarizes potential hazards and recommended safety precautions. Failure to follow
the safety instructions and instructions may result in personal injury and property damage.
2.3.1 Mechanical Hazards
Specimen Stage
Fingers can be trapped by the moving specimen stage.
§
Always close the chamber door before moving the specimen stage.
§
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your fin-
gers.
Chamber Door
Fingers can be pinched when closing the chamber door.
§
Use the recessed grip or door handle to close the chamber door.
§
Ensure not to get your fingers caught in the chamber door gap.
Gas Cylinders
Gas cylinders containing, for example, nitrogen or compressed air have a high internal pressure of
approximately 200 bar. If not properly handled, the contained gas can abruptly escape and cause
the gas cylinder to move in an uncontrollable manner.
§
Observe all safety labels on the gas cylinders and all safety instructions given by the gas cylin-
der manufacturer.
§
Always operate gas cylinders in an upright position and secure them so they will not tip over.
§
Before transporting gas cylinders, place protective caps on them.
Short Working
Distance
When opening the chamber door, the microscope or specimen can be damaged if the specimen
stage is at a short working distance. If a BSD detector is inserted, it can be damaged as well.
§
Always move the specimen stage to a long working distance before opening the chamber
door.
Isolation Mounts
The isolation mounts are specified only up to 4.5 bar. If you pump up the isolation mounts above
4.5 bar, then the isolation mounts could be destroyed.
§
When pumping up the isolation mounts, avoid pressures above 4.5 bar.
2.3.2 Electrical Hazards
Hazardous Voltage
inside the
Microscope
High voltages are present inside the microscope. Contact may cause burn or electrical shock.
§
Ensure proper grounding. For more information, refer to the Installation Requirements docu-
ment.
§
Only authorized ZEISS service representatives are allowed to service the microscope.
§
Do not try to service the microscope yourself.
High Leakage
Currents
High leakage currents are present in the microscope. Contact may cause burn or electrical shock.
§
Ensure proper grounding. For more information, refer to the Installation Requirements docu-
ment.
§
Do not operate the microscope without the separate ground connection.
Opening the Gun
If you open the gun while the mains power is connected to the microscope, then contact may
cause electrical shock.
§
Always disconnected the mains power from the microscope before you open the gun.
Residual Voltage
at the Mains Plug
After unplugging the mains plug residual voltage is present at the pins of the plug which may
cause electrical shock.
§
After unplugging the mains plug wait at least 5 s before touching the pins of the mains plug.
Stage on Bias
Voltage
If you open the chamber door while the stage is still on bias voltage, then contact may cause elec-
trical shock.
§
Always switch off the beam deceleration before you open the chamber door.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
11
Содержание EVO
Страница 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
Страница 179: ......