Zeiss EVO, Инструкция по эксплуатации, Страница: 174 / 180

Glossary ZEISS
Faraday cup
Small insulated metal container,
equipped with an aperture where elec-
trons can enter but not escape. Used to
measure the specimen current in the mi-
croscope.
Focus wobble
Function that sweeps the focus of the
objective lens backwards and forward
through the focus on the specimen
plane. When the aperture is misaligned a
lateral shift is observed.
GUI
Graphical User Interface
H
Height
HDBSD
High Detection Backscattered Electron
Detector
HV
High Vacuum
IGC
Industrial Gases Council
LaB₆
Lanthanum hexaboride
PC
Personal Computer
PE
Protective Earth (ground)
PE
Primary Electron
Penning gauge
Device for measuring high vacuum in the
vacuum system.
Pre-vacuum pump
A pump for generating a pre-vacuum.
Primary electron beam
Narrowly bundled beam of accelerated
electrons that hit the specimen surface.
R
R-axis (Rotation)
RF
Radio Frequency
SCD
Specimen Current Detector
Scintillator
Substance that absorbs electrons and in
response, fluoresces photons while re-
leasing the previously absorbed energy.
SE
Secondary Electron
Secondary electrons
Low-energy electrons that are emitted
from the specimen surface when the
specimen is hit by the primary electron
beam. Secondary electrons are generated
by inelastic scattering.
SEM
Scanning Electron Microscope
SEMI
Semiconductor Equipment and Materials
International (SEMI) is a industry associa-
tion comprising companies involved in
the electronics design and manufacturing
supply chain.
STEM
Scanning Transmission Electron Micro-
scope
Stigmator
Compensates astigmatism (lens aberra-
tion), so that the electron beam becomes
rotationally symmetrical.
T
T-axis (Tilt)
TEM
Transmission Electron Microscope
User
Person examining a sample under the mi-
croscope.
174 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006