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2 Safety | 2.5 Safety Devices and Interlocks ZEISS
Fig. 3: Circuit breaker
The circuit breaker does not completely isolate the plinth from the mains power. This can only be
done using the Main Disconnect Device.
2.5.4 Locking Devices
The microscope is equipped with several locking devices.
2.5.4.1 Column Interlock Device
The column interlock device switches off the EHT.
This interlock device was introduced at the end of 2010 and is not optionally available for older
EVO models.
Fig. 4: Column interlock device
2.5.4.2 Vacuum Locking Device
The vacuum locking device ensures that gun vacuum and system vacuum are better than the re-
quired thresholds.
2.5.4.3 Beam Deceleration Kit Interlock
Several hardware and firmware measures ensure a safe operation of the beam deceleration kit.
Before a stage bias potential can be applied, a vacuum switch is checked, the turbo pump signal is
checked and the CAN bus communication is checked.
20 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006