Zeiss EVO, Инструкция по эксплуатации, Страница: 115 / 180

ZEISS 7 Troubleshooting | 7.1 Chamber
Symptom Cause Measure
Stage does not move Stage needs to be
initialized Refer to Initializing the Stage [
}
115]
Stored position of
the specimen stage
cannot be ap-
proached correctly Absolute stage
movement is re-
quired, stage needs
to be driven to a
well-defined position Refer to Initializing the Stage [
}
115]
Microscope does not
vent No nitrogen Check nitrogen supply
No compressed air Check compressed air supply
Vac ready = OK is
not displayed after
specimen exchange
System vacuum is
bad due to a vac-
uum leak at the
chamber door Check the chamber door seal for cleanliness.
If required, refer to Replacing the Chamber
Door Seal [
}
117]
Vac ready = OK is
displayed very late
after specimen ex-
change
Gas ballast at rotary
pump or scroll pump
is activated Deactivate gas ballast at the pre-vacuum
pump
Vac ready = OK is
displayed abnormally
fast
Penning gauge has
not been identified
correctly Restart the microscope.
If this does not solve the problem, contact
your local ZEISS service representative
If you use a LaB₆ fila-
ment and gun vac-
uum is worse than
1 × 10⁻⁶ mbar The pumping capac-
ity of the ion getter
pump decreases in
the course of time,
thus deteriorating
the gun vacuum
Refer to Baking out the Gun Head [
}
120]
Tab. 6: Troubleshooting
7.1 Chamber
7.1.1 Initializing the Stage
If a stored stage position cannot be approached or if the stage does not move or does not move
accurately, the stage needs to be initialized.
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4
Always close the chamber door before moving the specimen stage.
4
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
Prerequisite ü The specimen chamber has been evacuated, refer to Loading the Specimen Chamber [
}
63] .
ü Requires the Stage Initialise privilege.
ü If there are any large specimens inside the chamber, remove them before initializing.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 115