
5
Subassembly Removal and Replacement
Chamber Pressure Control Assembly (02-52387)
The chamber pressure control assembly contains the following
components:
♦
Pressure transducers
»
Low vacuum transducer (0-30 torr)
»
High vacuum transducer (0-200 torr)
»
Zero reference transducer
♦
Atmospheric pressure switch
Figure 18. Chamber Pressure Control Assembly
68 STERRAD
®
NX
™
Service Guide
Содержание sterrad NX
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