Functional
Description
3
Subsystem Components
Temperature (cont’d)
Condenser temperature sensor
Condenser
heat/cool
Condenser
fans
Vacuum
Vacuum pump
Vacuum control valve
Vent valve
Atmospheric pressure switch
Chamber pressure sensors (2)
Vacuum control valve current sensor
Vent valve current sensor
Inlet valve
Inlet valve current sensor
Transition valve
Transition valve current sensor
Vaporizer pressure sensor
Oil return valve
Oil return valve current sensor
Plasma
LFPS II power supply
Delivery
Carriage
sensor
Barcode reader (option)
Cassette
motor
Delivery valve sensor
Air pump current sensor
Door
Open/close
sensor
Door
lock
STERRAD
®
NX
™
Service Guide
35
Содержание sterrad NX
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