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Operation
CAUTION
Risk of injury
Fingers could be trapped in the moving specimen stage.
Always close the chamber door before you move the specimen stage.
CAUTION
If you work with aggressive or toxic chemicals there may be a risk of injury.
Wear suitable protective clothing, gloves and eye/face protection. Do not eat, drink or
smoke at work. Refer to local safety regulations.
CAUTION
Risk of injury due to aggressive or toxic chemicals.
Risk of damage to environment.
When disposing of waste that has been generated during a service operation comply with
all national and local safety and environmental protection regulations.
GIS
The optional gas injection system allows injecting process gases onto the specimen surface.
During operation, the process gases are generated out of precursor substances.
CAUTION
Hazard due to irritant gases that might be released from the precursors.
Gases can cause irritation to eyes, skin, and respiratory system.
Do not remove a reservoir from the workstation.
Contact the Carl Zeiss service to have an empty reservoir replaced.
Never try to open a reservoir.
During operation, unknown reaction products may be generated, when specimen material, reac-
tive precursor products, electron beam and/or ion beam get in contact.
CAUTION
Hazard due to dangerous reaction products that might be present in the specimen cham-
ber during or after operation.
Wear personal protective equipment when touching the inner parts of the specimen cham-
ber or the specimen.
Do not remove a reservoir from the workstation.
Contact the Carl Zeiss service to have an empty reservoir replaced.
Never try to open a reservoir.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...