Zeiss AURIGA Compact Crossbeam, Instruction Manual

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e Set the geometrical slope to be milled:
At Slope (Degrees) enter 0 .
f Set the Depth in µm .
This defines how deep the milling should go
at the lamella edges.
g Set the Number of Layers .
The number of layers determines how often
a milling element is milled.
h Select material data from the Material drop-
down list.
The material data can be edited via the FIB
Materials Editor .
i Select the Angle 0 .
j Set the Milling Current depending on your
application and the size of your milling ob-
ject:
Examples
k In the Track WD drop-down list, select Yes or No .
If you select Yes , the working distance and the Beam Shift will be tracked while milling into
the depth.
IMPORTANT
Track WD is only useful if the stage is tilted to 54°.
How to
continue
Continue with starting the milling procedure.
Application Size Recommended milling current
Coarse milling
large e.g. 10 x 10 µm
2
, 8 µm deep
5 - 10 nA
medium e.g. 5 x 5 µm
2
, 3 µm deep
2 nA
Medium polish - 100 - 500 pA
Fine polish - 10 - 50 pA
Lithography - 1 - 20 pA