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6.6.6.5. Adjusting Beam Shift correction
The Beam Shift correction is used to correct the different beam positions of the different probe
current settings. Because of the different condenser settings the beam path through the column
can be slightly different. Therefore, the beam hits the sample at different locations. This can be
corrected by using a part of the Beam Shift (called Beam Shift correction). The 30kV:50 pA probe
current is the reference current where no correction is applied.
IMPORTANT
The 50 pA probe current is the reference probe current. All focus values and the
Beam Shift correction are stored in reference to the 50 pA probe current. There-
fore, this probe current must be adjusted first.
IMPORTANT
The Beam Shift correction has only a limited range.
Procedure:
1
Select
Mag = 2000 x
.
2
Go to
FIB Control/Align
and select the
30kV:50 pA reference current from the drop-
down menu.
3
Select
View/Movable Crosshairs
from the
menu bar.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...