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Zeiss AURIGA Compact Crossbeam, Instruction Manual

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Zeiss AURIGA Compact Crossbeam Instruction Manual Download Page 136

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7.3. Change of consumables and chemicals

The change of consumables and chemicals have to be done by a Carl Zeiss servce engineer in 
mandatory intervals. 

The times scheduled are designed for the maximum equipment performance level:

1

 There is no warranty on cathodes; cathode manufacturers do not guarantee any lifetime.

Interval

Component/Part

Every 6000 h

1

(filament on)

Gun (cathode)

1

As required or yearly
(and after cathode exchange)

Standard multihole aperture
Anode aperture
Extractor aperture
Anode aluminium seal
Copper seal at gun head

Yearly or as required

Pre-vacuum pump

Yearly

SE2 detector
In-lens detector
InlensDuo detector

As required

Ion source

With every ion source replacement

FIB apertures

Upgraded workstation

If used up

Precursors

Table 7.1: Time schedule

Summary of Contents for AURIGA Compact Crossbeam

Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...

Page 2: ... will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use Software programs will fully remain the property of Carl Zeiss Microscopy No program documentation or subsequent upgrade th...

Page 3: ...itch 19 2 4 1 5 EMO button 20 2 4 1 6 Main shut off valves 20 2 4 2 Safety labels and labels 21 2 4 2 1 At the front of the workstation 21 2 4 2 2 At the rear of the workstation 22 2 4 2 3 At the rear of the electron optical column 23 2 4 2 4 Inside the workstation 23 2 4 3 Material Safety Data Sheets 23 2 5 Safety instructions for handling precursors with GIS upgrade only 24 3 Description 25 3 1 ...

Page 4: ...51 4 1 Transport 51 4 2 Storage 52 5 Installation 53 6 Operation 55 6 1 Switching on the workstation 55 6 2 Starting the SmartSEM user interface 56 6 3 Finding your way in the SmartSEM user interface 58 6 3 1 Showing or hiding toolbars 58 6 3 2 Showing or hiding the data zone 59 6 3 3 Showing a full screen image 59 6 3 4 Docking panels 60 6 3 5 Opening the Panel Configuration Bar 62 6 4 SEM operat...

Page 5: ...with five channel GIS 102 6 6 4 3 Selecting deposition conditions 105 6 6 4 4 Starting the deposition procedure 107 6 6 5 Setting detection parameters 110 6 6 5 1 Using the SESI detector optional 110 6 6 6 Adjusting a FIB probe current at high kV 30 kV 112 6 6 6 1 Overview 112 6 6 6 2 Adjusting a low probe current pA 114 6 6 6 3 Adjusting a high probe current nA 116 6 6 6 4 Optimising a high probe...

Page 6: ...8 2 Chamber 139 8 2 1 Initialising the stage 139 8 2 2 Replacing the chamber door seal 139 8 3 Column 141 8 3 1 Baking ot the gun head 141 8 3 2 Ion source Workstation with FIB 144 8 3 2 1 Checking the lifetime 144 8 3 2 2 Regenerating by heating 144 8 4 Power circuit 147 8 4 1 Checking the circuit breakers 147 9 Shutdown and disposal 151 9 1 Putting the workstation out of operation 151 9 2 Dispos...

Page 7: ...s of the workstation refer to the respective manuals delivered with the workstation You will find these manuals in the document folder At a glance This instruction manual contains the following chapters 1 About this manual Explains function and structure of this instruction manual 2 Safety Summarises important safety details 3 Description Describes structure and principle of operation of the works...

Page 8: ...or serious injury WARNING This safety symbol and signal word indicates a potentially hazardous situation Disregarding this warning COULD result in death or serious injury CAUTION This safety symbol and signal word indicates a potentially hazardous situation Disregarding this warning MAY result in minor or moderate injury CAUTION This signal word used without a safety symbol indicates a potentially...

Page 9: ... Type key1 key2 Type key 1 first then type key 2 on the keyboard Type Ctrl Alt Del Simultaneously type CTRL key ALT key and DEL key on the keyboard Click the Magnification icon Select File Exit from the menu Icons buttons and menus are printed in bold Enter 10 kV in the EHT target field Values to be selected are printed in italics Text Meaning Click Press the left mouse button Right click Press th...

Page 10: ...ly skilled person who has been trained to perform basic main tenance tasks User A person or organisation that uses products of Carl Zeiss Carl Zeiss service engineer Carl Zeiss service staff Specially trained service expert either Carl Zeiss staff or authorised service partner of Carl Zeiss EMO box Emergency off box a safety device that contains the safety related electronics to switch off the wor...

Page 11: ...ection system With the help of a process gas the focused ion beam cuts into the specimen surface Gas assisted deposition with ion beam requires optional gas injection system With the help of a process gas the focused ion beam deposits material onto the specimen surface Gas assisted etching with electron beam requires optional gas injection system With the help of a process gas the electron beam cu...

Page 12: ... due to technical measures Reactive product Precursor Used for Tungsten W CO 6 Tungsten hexacarbonyl deposition Platinum C9H16Pt Methylcyclopentadienyl trimethyl platinum IV deposition Silicon dioxide insulator C12H24O6Si Diacetoxydi t butoxysilane deposition Carbon C14H10 Phenanthrene deposition Gold Dimethyl acetylacetonate gold III deposition Fluorine XeF2 Xenondifluoride gas assisted etching s...

Page 13: ...n in the document folder Operator training Within the scope of initial start up the Carl Zeiss service staff will perform a basic operator training The basic operator training consists of fundamental operation procedures including safety instruc tions Besides an introduction to basic maintenance tasks will be given for an advanced operator who has to be an electrically skilled person The training ...

Page 14: ...orkstation during operation Only authorised Carl Zeiss service engineers are allowed to service the workstation Do not remove any parts Do not disable any parts of the interlock system Use genuine Carl Zeiss parts exclusively Observe all safety and X ray protection regulations In Germany the operation of the workstation is permission free as the following requirements are fulfilled The maximum acc...

Page 15: ... ventilated with gaseous nitrogen Inhaling nitrogen may cause unconsciousness During specimen exchange keep the chamber door open as short as possible Avoid inhaling the air from within the specimen chamber Ensure the area around the workstation is sufficiently ventilated IMPORTANT Concerning the hazards of nitrogen installations and associated safety precautions refer to the current version of gu...

Page 16: ...cting process gases onto the specimen surface During operation the process gases are generated out of precursor substances CAUTION Hazard due to irritant gases that might be released from the precursors Gases can cause irritation to eyes skin and respiratory system Do not remove a reservoir from the workstation Contact the Carl Zeiss service to have an empty reservoir replaced Never try to open a ...

Page 17: ...lectron optical column 2 3 2 Hazards not related to personal injury CAUTION Risk of property damage when opening the chamber door Workstation or specimen could be damaged if specimen stage is at short working dis tance Always move specimen stage to long working distance before opening the chamber door CAUTION Risk of property damage Connect Carl Zeiss approved equipment only Ensure the total load ...

Page 18: ...must not be operated with removed protective cover panels 2 4 1 2 Interlock system The interlock system includes several functions Chamber door interlock The chamber door interlock is located at the inner bottom front side of the specimen chamber It ensures that the door of the specimen chamber is closed properly When this interlock is activated i e no electrical contact EHT Vac ready no is indica...

Page 19: ...r of the plinth It cuts off the mains power from the FESEM Other devices connected to the EMO box remain turned on 2 4 1 4 EMO box with main switch The MAIN switch 1 is located at the front panel of the EMO box It cuts off all devices connected to the EMO box from the mains power supply The main switch can be secured against re activation The main switch guarantees an ampere interrupt ing capacity...

Page 20: ...stallation of main shut off valves at the site of installation The following main shut off valves are required water supply water runback nitrogen supply compressed air supply The main shut off valves have to be easily accessible They must close off the connections to the corresponding media when needed The main shut off valves have to be lockable in their OFF position in order to prevent accident...

Page 21: ...tion 2 4 2 1 At the front of the workstation Position Subject Label A Safety information Avoid injury Read and understand the instruction manual before operating this product B Safety information Risk of injury Fingers could be trapped Always close the chamber door before you move the stage C Safety information Risk of damage FESEM or specimen stage could be damaged if the specimen stage is at sho...

Page 22: ...ove any parts Use genuine Carl Zeiss parts exclusively Observe local safety and X ray protection regulations Legal information Safety information High leakage current Ensure proper grounding Do not operate the electron microscope without separate ground connection Safety information Suffocation hazard Specimen chamber is ventilated with gaseous nitrogen Ensure the area around the electron microsco...

Page 23: ...data sheets MSDS of chemicals used in combination with the workstation are contained in the document folder delivered with the workstation Subject Label Safety information Hazardous voltage inside Contact may cause burn or electric shock Only authorised service staff is allowed to service the equipment Disconnect power before opening Safety information Burn hazard Hot surfaces inside during bakeou...

Page 24: ...zard due to irritating and toxic gases Gases can cause irritation to eyes skin and respiratory system High concentrations may cause central nervous disorders Do not remove a reservoir from the workstation Contact the Carl Zeiss service to have the empty reservoir replaced Never try to open a reservoir For more information refer to the instruction manual of the GIS and the Material Safety Data Shee...

Page 25: ... GIS 3 Charge Compensator 4 Five channel GIS with integrated charge compensation CC Upgrades Possible applications GIS Charge compensation CC Basic workstation with GEMINI column and CANION FIB column SEM operation FIB imaging Milling 2 SEM operation FIB imaging Milling Gas assisted etching Gas assisted deposition Electron beam deposition Electron beam etching 2 4 3 4 SEM operation FIB imaging Ima...

Page 26: ... 1 View of AURIGA Compact workstation with several upgrades 1 Specimen chamber 7 Control panel optional 2 FIB column 8 Personal computer PC 3 Electron optical column GEMINI column 9 Dual joystick 4 Detector 10 ON OFF STANDBY button 5 Airlock optional 11 Plinth 6 Monitors 1 5 3 6 2 4 7 8 10 11 9 ...

Page 27: ...the injection of one or more process gases to the specimen surface 3 2 1 1 Multi GIS The Multi GIS allows you to inject up to five different precursor gases For details refer to the respective Instruction Manual 3 2 1 2 Single GIS The one channel GIS allows you to inject one precursor gas For details refer to the respective Instruction Manual ...

Page 28: ...nsator inhibits charging of non conducting specimens by emitting a local flow of gaseous nitrogen onto the area of interest The pneumatic retraction mechanism allows you to quickly toggle between charge compensation mode and high vacuum mode For details refer to the respective Instruction Manual 3 2 2 2 Five channel GIS with integrated charge compensation Alternatively a five channel GIS with inte...

Page 29: ...ts 3 3 1 SmartSEM user interface The workstation is controlled by the SmartSEM software The software is operated via a graph ical user interface menu bar status bar image area toolbar data zone annotation bar caption bar icon mouse assignment panel configuration bar FIB mode selection FIB toolbar ...

Page 30: ... button is an emergency stop for the stage All axes are deflection compensated When the joystick is only moved slightly the respective axis will move slowly However major movements of the joystick will result in a faster movement of the stage Two M push buttons allow control of a second Z axis M on super eucentric stages to set the eu centric point of the specimen tilt on these stages The X Y Z an...

Page 31: ...ates a full sized keyboard and allows direct ac cess to the most frequently used functions on the workstation The following functions are available through Encoders Push buttons Magnification Reduced Stigmator X Wobble Stigmator Y Freeze Aperture X Exchange Aperture Y Resume Scan Rotate Camera Shift X Scan Speed Shift Y Scan Speed Brightness Contrast Focus ...

Page 32: ...re vacuum pump 5 and turbo pump 6 evacuate the specimen chamber The vacuum in the specimen chamber is measured by a Penning gauge 4 The detected vacuum values are shown as System vacuum in the SmartSEM user interface As long as the detected pressure in the specimen chamber is not ready for operation the column chamber valve 8 is closed in order to separate the specimen chamber from the column 1 Gu...

Page 33: ...ge appears in the SmartSEM user interface Gun and EHT can be switched on Quiet Mode The automatically controlled Quiet Mode is optionally available This option allows switching off the pre vacuum pump after specimen exchange when the vacuum threshold is achieved 3 4 2 Specimen stage Standard specimen stage is a 6 axes motorised super eucentric stage that is controlled by the SmartSEM software The ...

Page 34: ...tic electromag netic lens doublet Gun A Schottky field emitter serves as gun 1 The filament is heated by applying the filament current Electrons are emitted from the heated filament while an electrical field called extractor UExt volt age is applied To suppress unwanted thermoionic emission from the shank of the Schottky field emitter a suppressor voltage USup is applied as well Fig 3 3 Schematics...

Page 35: ... 4 Standard aperture is the 30 µm aperture hole that is the central aperture The aper ture size is decisive for the probe current Other aperture sizes are selectable to meet the require ments of a wide range of applications Stigmator The stigmator compensates for astigmatism so that the electron beam becomes rotationally sym metrical The electron beam is focused onto the specimen while being defle...

Page 36: ...urce 1 Gallium ions Ga are extracted from a liquid metal ion source The ions are accelerated by the acceleration voltage to an energy of maximum 30 keV The ion emission is regulated by the ex tractor and stabilised by the suppressor Gallium is used up during operation Therefore the gallium emitter cartridge is a consumable Moreover the gallium emitter has to be regenerated by heating from time to ...

Page 37: ...current is defined by a set of software controlled mechan ical apertures By using the different apertures in combination with the different condenser set tings the probe current can be continuously adjusted in the range between 1 pA and 50 nA Among other things the probe current depends on aperture size and condenser settings The objective lens is designed as an electrostatic einzel lens system It...

Page 38: ... blanked ion beam is active The SE sig nal is synchronised to the FIB scan Channelling contrast imaging voltage contrast imaging Defining milling patterns on the specimen surface Grain analysis CrossBeam operation SEM FIB Image is composed of SEM and FIB components Setting the coincidence point Mill No image Mills with the milling parame ters set milling current Only deposition by ion beam No depo...

Page 39: ...ters Energy and angle dis tribution For that purpose the InlensDuo detector has been developed Detector type Detected signals Availability Typical application Reference In lens detector annular SE detector SE Standard Surface structure See section 3 4 5 1 SE2 detector Everhart Thornley type SE2 Standard Topography See section 3 4 5 2 InlensDuo detector with filtering grid in column detector BSE Op...

Page 40: ...he SE generated on the specimen surface At the In lens detector the electrons hit a scintillator generating flashlight that is guided out of the beam path by means of a light guide The light information is multiplied in a photomultiplier and output as a signal which can be electronically processed and displayed on the monitor IMPORTANT The In lens detector can be used up to an acceleration voltage...

Page 41: ... directing the low energy SEs to wards the scintillator For all standard applications the collector voltage should be set to 300 V Fig 3 7 Schematics of the SE2 detector Negative collector volt age Selecting a negative collector voltage generates a field deflecting the low energy SEs so that they cannot reach the scintillator and do not contribute to the signal Only high energy BSEs reach the scin...

Page 42: ...n These electrons are accelerated by the field of the electrostatic lens Filtering grid Without switching on the filtering grid voltage the InlensDuo detector has the same characteristics as the In lens SE detector see section 3 4 5 1 The InlensDuo detector primarly detects secondary electrons SEs By switching on the filtering grid 2 voltage the SEs will be rejected and only backscattered electron...

Page 43: ...5 are attracted by a collector grid 4 and accelerated to the converter In the converter both electrons and ions are converted into secondary electrons which are used to generate an image The SESI detector can be operated in two modes SE mode and Ion mode 1 FIB column 4 Collector grid 2 GEMINI column 5 Specimen 3 SESI detector Operating mode FIB mode Detected signals Typical application SE mode typ...

Page 44: ...INI electromagnetic electrostatic objective lens system 68 conical final lens with water cooling for best thermal stability and reproduci bility Stigmator Eight pole electromagnetic Apertures Seven apertures with electromagnetic selection Beam Shift Width max 15 µm depending on EHT and WD Extended Beam Shift width 100 µm depending on EHT and WD Specimen chamber and stage AURIGA Compact Specimen ch...

Page 45: ...ltiplier Chamber viewing a Infrared CCD camera b 2nd infrared CCD camera SESI detector optional Combined Secondary Electron Secondary Ion SESI detector based on a scintillator photomultiplier system easy change between secondary ion and secondary electron mode by converting the elec trode voltage Alternative to chamber SE detector InlensDuo detector optional Column mounted high efficiency scintill...

Page 46: ...uct Specification AURIGA Compact Performance Resolution 5 nm at 30 kV Acceleration voltage 1 30 kV 5 kV as an option Probe current 1 pA 50 nA Magnification range 300 x 500 000 x Ion optics Ion source Gallium liquid metal ion source Lenses Two electrostatic lenses Stigmator Eight pole electrostatic Apertures 7 apertures motorized Beam Shift 7 µm ...

Page 47: ...breaker 25 A switch off behaviour K on installation site A special emergency off circuit is available part no 340002 0167 The EMO box is mandatory for the upgrade of FIB and or GIS The EMO box should be mounted close to the system Wiring that runs outside the workstation should be laid and protected in appropriate cable ducts or trays Moreover it is recommended to protect the complete room by inst...

Page 48: ...96 Standard Flow rate Approx 40 l min for ventilation of specimen chamber with chamber door open Pressure 0 30 0 35 MPa 3 0 3 5 bar Compressed air Flow rate Less than 1l min Pressure 0 6 0 8 MPa 6 8 bar Quality Oil free Environmental requirements Ambient Temperature 21 C 4 C Stability 0 5 C Relative humidity Less than 65 Altitude To guarantee undisturbed operation do not operate the workstation at...

Page 49: ...to the respective instruction manual 3 8 Customer service For customer service please contact your local Carl Zeiss service engineer A list of Carl Zeiss locations and authorised service partners can be found at http www zeiss com microscopy In case of questions regarding radiation protection please contact the Carl Zeiss Radiation Safety Officer Dr Wolfgang Sold Carl Zeiss AG 73447 Oberkochen Ger...

Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...

Page 51: ...he shipping document In order to avoid damage of the workstation by shock the workstation has to be exclusively trans ported in air suspended vehicles Temperature during transport has to be between 10 C and 70 C The workstation is delivered in two crates If required there are additional boxes for optional equipment Check that none of the items has been damaged during shipment Microscope plinth Wra...

Page 52: ...O çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP QK qê åëéçêí åÇ ëíçê ÖÉ píçê ÖÉ 4 2 Storage The packed workstation has to be stored in a dry place Temperature during storage has to be between 10 C and 70 C ...

Page 53: ...RK fåëí ää íáçå fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RP çÑ NSQ 5 Installation Unpacking installation and first start up are carried out by authorised Carl Zeiss service staff ...

Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...

Page 55: ...he SmartSEM user interface SEM operation Electron beam deposition or etching with GIS upgrade only CrossBeam operation Using the help functions Closing the SmartSEM user interface Switching off the workstation as a matter of routine Emergency off Switching off the workstation completely 6 1 Switching on the workstation Preconditions Workstation is in STANDBY mode 1 Press the green ON button 1 that...

Page 56: ... system has been loaded IMPORTANT To receive the Windows login data contact your Carl Zeiss service engineer 1 Double click the Carl Zeiss SmartSEM icon Alternatively select Start Programs Smart SEM SmartSEM User Interface The EM Server opens loading various drivers The function of the EM Server is to implement the internal communication between the SmartSEM software and the hardware of the workst...

Page 57: ...êÑ ÅÉ The EM Server Log On dialogue appears 2 Enter your user name and password 3 Confirm by clicking on OK The SmartSEM user interface opens The EM Server is minimised to a small element icon on the right side of the Windows task bar The SmartSEM software is ready to operate the workstation ...

Page 58: ...toolbars such as user toolbar status bar and annotation bar are available for easy access to the SmartSEM functions 1 Select View Toolbars Alternatively type Ctrl B The Toolbar Views panel is shown 2 To show a toolbar activate the respective checkbox 3 To change the tooltip features of the user toolbar select the respective radio button on the right hand side of the panel 4 Confirm by clicking on ...

Page 59: ...nclude a µ marker to show the base magnification 1 Select View Data Zone Show Data Zone from the menu A tick is shown to indicate that the function is activated Alternatively type Ctrl D to toggle the data zone 6 3 3 Showing a full screen image To take advantage of the full monitor size to display the microscopic image show a full screen image 1 Select View Toggle Full Screen Image from the menu A...

Page 60: ... panel is to keep the area of the image completely clear as the docking panel is outside the main window 1 To show the docking panel select View Tool bars from the menu 2 Activate the Docking Panel checkbox The docking panel is shown on the right hand side of the image area 3 To move the docking panel to the left hand side pick up the panel by clicking on the title bar and drag it to the other sid...

Page 61: ...êÑ ÅÉ 4 To stick a control panel to the docking panel click the title bar of the control panel and drag it to the docking panel The panel becomes integrated into the docking panel You can stick several control panels to the docking panel 5 To minimise a panel click the arrow button 1 in the title bar 1 ...

Page 62: ...ivate the Docking Panel checkbox The docking panel is hidden 6 3 5 Opening the Panel Configuration Bar 1 Select Tools Goto Panel from the menu Alternatively click the arrow button at the side of the image area The Panel Configuration Bar opens showing an alphabetical list of functions 2 To select a function double click its name in the list ...

Page 63: ...rkstation At a glance The complete sequence includes Preparing the sample holder Loading the specimen chamber Locating the specimen Switching on the gun Switching on the EHT Generating an image Optimising the image Saving the image Parts required No Allen wrench 1 5 mm delivered with the workstation Stub delivered with the workstation Tweezers for specimen delivered with the workstation Specimen h...

Page 64: ...imes Always wear lint free gloves when touching specimen sample holder or stage 1 Attach the specimen to the stub by using con ductive carbon adhesive metal or carbon tape etc Ensure that the specimen area to be analysed is in proper contact with the stub 2 Use the tweezers to insert the stub into the sample holder 3 Properly fix the stub to the sample holder Use the Allen wrench to tighten the lo...

Page 65: ...amberScope icon in the toolbar A TV view inside the specimen chamber is shown CAUTION Risk of damaging the objective lens and or your specimen Ensure not to hit the objective lens while driving the stage Change to TV mode to observe the moving stage 2 Select Tools Goto Control Panel from the menu The SEM Control panel opens ...

Page 66: ...rm by clicking on Yes The specimen chamber is filled with gaseous nitrogen CAUTION Suffocation hazard due to lack of oxygen since the specimen chamber is ventilated with nitrogen After the specimen exchange keep the chamber door open as short as possible Avoid inhaling the air from within the specimen chamber Ensure the area around the workstation is sufficiently ventilated 6 Slowly open the chamb...

Page 67: ... of the sample holder is exactly de fined 7 Mount the sample holder a Ensure that you place the dovetail in the correct orientation onto the holding device on the specimen stage b Make sure that the flat side of the dovetail of the sample holder is flush with the milled edge of the stage 8 Look into the specimen chamber to ensure that the specimen cannot hit any components when it is introduced in...

Page 68: ...SU çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP SK léÉê íáçå pbj çéÉê íáçå 10 In the SEM Control panel click Pump The vacuum status messages show the current vacuum levels achieved ...

Page 69: ...ens and or your specimen Ensure not to hit the objective lens while driving the stage Change to TV mode to observe the moving stage 2 Move the specimen by using the dual joystick optional or by calling the Soft Joystick via Tools Goto Panel Soft Joystick 3 Carefully move the specimen closer to the objective lens The distance between objective lens and specimen surface should be less than about 10 ...

Page 70: ...áÖ çãé Åí ÉåMP SK léÉê íáçå pbj çéÉê íáçå 6 4 1 4 Switching on the electron gun 1 In the Vacuum tab Check that EHT Vac ready Yes is indicated 2 In the status bar click Gun 3 Select Gun On from the pop up menu The gun is being run up ...

Page 71: ...in order to make it emit electrons 1 Watch the vacuum status messages on the Vacuum tab of the SEM Control panel When the required vacuum has been reached you will see the message Vac Status Ready 2 Go to the Gun tab 3 Set the acceleration voltage a Double click in the EHT field b Enter the desired acceleration voltage in the EHT Target field e g 10 kV c Confirm by clicking on OK ...

Page 72: ...í ÉåMP SK léÉê íáçå pbj çéÉê íáçå 4 Switch on the EHT a In the status bar click EHT b Select EHT On from the pop up menu The EHT is running up to 10 kV The status bar buttons are merged and the All but ton appears Now the electron beam is on ...

Page 73: ...ommended that you select the SE2 detector to obtain the first image as this detec tor provides a good signal to noise ratio even at large working distances 3 Go to the Scanning tab Select a fast scan speed e g Scan Speed 1 from the drop down list The lower the scan speed number the faster the scan of the specimen by the electron beam Scan Speed 1 allows you to get an im age quickly ...

Page 74: ... the magnification of 500 x The current magnification is indicated in the status bar 5 Set the focus a Press the middle mouse button and drag the mouse to focus The current working distance WD is indicated in the status bar 6 Adjust contrast and brightness a Go to the Detectors tab b Use the Brightness and Contrast sliders 7 Select a detail on the specimen surface 8 Focus the detail 9 Adjust contr...

Page 75: ...tep by step set a high magnification e g Mag 50 000 x Focus in between When selecting high magnifications it is recommended that you move the specimen by using the Beam Shift function instead of driving the stage 3 Use the Beam Shift function a Go to the Apertures tab b Click Beam Shift c Use the slider or the red marker to shift the beam 4 Click the Reduced Raster icon ...

Page 76: ...n that sweeps the focus of the objective lens backwards and forwards through the focus on the specimen plane If the aperture is slightly misaligned a lateral shift can be observed Intensity of wobble can be adjusted by using the Wobble Amplitude scroll bar Wobble speed can be accelerated by activating the Wobble Fast checkbox b Click Aperture Align Use the left and right slider of the Aperture Ali...

Page 77: ...ab set Scan Speed 7 8 Bring the image into focus 9 Toggle to Fine in the status bar Use Coarse and Fine mode of adjustment where appropriate 10 Correct astigmatism a Select a detail e g a mark or an edge on the specimen surface b Click Reduced Raster Ensure the selected detail is in the raster ...

Page 78: ...çå c In the Apertures tab Click Stigmation d In the Stigmation box use the arrow but tons or the left and right slider to obtain the sharpest possible image 11 Deactivate the reduced raster 12 In order to reduce image noise select a slower scan speed e g scan speed 6 to 8 ...

Page 79: ...o to the Scanning tab b In the Noise Reduction section select Freeze on End Frame from the drop down menu c Click Freeze A red dot at the right bottom of the image area indicates that the image is frozen 2 Select File Save Image from the menu 3 Enter a path and a file name 4 Confirm by clicking on the Save tif button ...

Page 80: ...Ñ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP SK léÉê íáçå pbj çéÉê íáçå To continue imaging unfreeze the image by selecting Image Unfreeze from the menu Alternatively you can click Unfreeze in the Scanning tab ...

Page 81: ...å 6 4 1 9 Finishing the work session To finish your work session switch off the EHT a In the status bar click All b Select EHT Off from the pop up menu It is recommended that you leave the gun on during the working week This should help to optimise lifetime of the cathode ...

Page 82: ...own menu The following table should serve as a help to find the required settings for your application Detectors EHT Typical WD Detector settings Remarks In lens 3 kV 20 kV 3 6 mm None 100 V 3 kV 2 3 mm 100 V max 4 mm SE2 1 30 kV min 4 mm Collector voltage bias adjustable from 250 V to 400 V Standard applications 300 V Pseudo BSE image 150 to 0 V Select the settings as described in section 6 4 2 2...

Page 83: ...uires a gas injection system GIS Depositing and etching with the electron is a suitable method for materials that cannot be pro cessed with the focused ion beam e g quartz masks Another advantage is that there is no impairment of surfaces i e no generation of amorphous layers Precursor gas Application Insulator SiO2 Deposition Platinum Pt Deposition Water reactive products Etching of material that...

Page 84: ...ance is volatile at room temperature Procedure 1 Open the Panel Configuration Bar 2 Double click Gas Injection System The Gas Injection System panel opens 3 Activate the Reservoir checkbox of the precursor you wish to work with The Capillary checkbox is activated automatically It is recommended that the heating remains switched on all the time to ensure stable conditions because it can last some t...

Page 85: ...cimen Make sure to position the specimen surface at a safe working distance Procedure 1 Open the Panel Configuration Bar 2 Double click E Beam Deposition and Etch The E Beam Deposition and Etch panel opens A deposition object is shown in the image area 3 Resize the deposition object to the appropriate size 4 Select the required precursor 5 Set a Gas Wait Time 6 Set a Total Duration Time 7 Set a Sc...

Page 86: ...ted Adjusting tilt eucentricity Switching on the ion beam FIB Setting the coincidence point 6 6 1 1 Getting started 1 Switch on the workstation 2 Start the SmartSEM user interface and log in 3 Initialise the specimen stage 4 Load the specimen chamber with an appropriate specimen 5 Evacuate the specimen chamber 6 Switch on the SEM a Switch on the gun b Switch on the EHT 7 Ensure the Specimen Curren...

Page 87: ... using the M axis the working distance will be changed during the eucentricity setup Ensure the working distance is 10 mm or more 1 Open the Panel Configuration Bar 2 Double click FIB Daily Adjust The FIB Daily Adjust panel opens 3 Activate the Crosshairs checkbox to show the crosshairs 4 Center a characteristic feature in the middle of the screen i e in the middle of the crosshairs 5 Click Eucent...

Page 88: ...2 Ensure the FIB Gun Pressure is better than 5 x 10 7 mbar CAUTION Danger of arcing Danger of damaging the ion source Before switching on the ion beam ensure the FIB gun pressure is better than 5x10 7 mbar 3 Check the current status of the system vacuum To be able to switch on the ion beam the system vacuum has to be 5 x 10 5 mbar or better 4 Click the FIB icon ...

Page 89: ...Do not change the FIB Extr Target value Changing this value would require a complete adjustment of the FIB probe currents 5 Ensure the Regulate checkbox is activated This guarantees a stable emission current The emission is automatically regulated by chang ing the FIB Suppressor Target which can have val ues between 2000 V and 0 V ...

Page 90: ...ally a Activate the FIB Auto Heating checkbox CAUTION Risk of instabilizing the ion source due to incessant automatic heating To ensure optimum operation the ion source must be heated manually at regular intervals The manual heating will be required after having performed the Auto Heating for about 5 times i e about every 2 3 weeks However this interval is dependend on the usage of the workstation...

Page 91: ...é Åí ÉåMP VN çÑ NSQ êçëë_É ã çéÉê íáçå 7 Initialise the FIB apertures Click Init Aperture The aperture initialisation may require several sec onds 8 To switch on the ion beam On The FIB Gun is ramping up The gun valve is opened automatically ...

Page 92: ... ours Green background The emission current equals the target 0 1 µA Yellow background The emission current differs from the target by more than 0 1 µA Red background The suppressor voltage has almost reached its limit IMPORTANT If you intend to deposit platinum with the optional GIS you should start heating the plati num precursor now Refer to section 6 6 4 1 How to continue Continue with setting...

Page 93: ... view centre the feature 7 Open the Panel Configuation Bar 8 Double click FIB Daily Adjust 9 Tilt the stage to 54 The FIB Daily Adjust panel opens 10 Click Coincidence 11 Follow the instructions in the wizard 12 Click Start 13 To centre the feature only move the stage Do not use the centre point function because it is based on Beam Shift and can therefore have a negative effect on the alignment 14...

Page 94: ...ws removing a given depth At a glance The complete sequence includes Selecting milling conditions Starting the milling procedure Preconditions Electron beam has been switched on Ion beam has been switched on Tilt eucentricity has been adjusted Specimen has been moved to the coincidence point 6 6 2 1 Selecting milling conditions 1 Select FIB mode from the drop down list 2 Select a milling object fr...

Page 95: ...ide where the pro cess will end The Shape tab opens 4 Enter the required parameters a Select Mill For Depth b Set the size of the milling object Enter values for Width and Height Alternatively click the markers of the mill ing object and drag c Set the position of the milling object Enter values for CentreX and CentreY Alternatively select the milling object Click the line between the markers and ...

Page 96: ...e FIB Materials Editor i Select the Angle 0 j Set the Milling Current depending on your application and the size of your milling ob ject Examples k In the Track WD drop down list select Yes or No If you select Yes the working distance and the Beam Shift will be tracked while milling into the depth IMPORTANT Track WD is only useful if the stage is tilted to 54 How to continue Continue with starting...

Page 97: ...ist All previous milling objects are deleted from the milling list 2 Click Add The current milling object is together with the selected milling conditions added to the milling list The time needed to process the object is shown under the Add button 3 Go to the Options tab 4 Activate the When milling switch to Mill SEM mode checkbox ...

Page 98: ... íáçå êçëë_É ã çéÉê íáçå 5 To start the milling go to the Shape tab and click Mill The milling process starts The progress marker is shown The Mill tab opens which allows you to directly control the milling progress The milling process ends automatically ...

Page 99: ... taking an image 1 To record a FIB image click Grab FIB Frame Grabbing a FIB image provides an orthogonal view onto the specimen surface 2 To record a SEM image click Grab SEM Frame Grabbing a SEM image provides a sharp im age since the milling is paused When clicking one of the Grab Frame buttons the milling is stopped while the image is recorded After having finished the grabbing the milling con...

Page 100: ...M XB At a glance The complete sequence includes Heating the platinum precursor Outgassing the platinum precursor Selecting deposition conditions Starting the deposition procedure Preconditions Workstation has been prepared Stage is tilted to 54 6 6 4 1 Heating the platinum reservoir 1 Heat the precursor a Go to the GIS tab of the FIB Control panel b Activate the Reservoir checkbox of Platinum The ...

Page 101: ...MPORTANT It is recommended that you switch on the precursor heating at least two hours before you start the deposition procedure 2 If required initialise the GIS micro stage a Go to the GIS tab b Click Stage Initialise How to continue Continue with outgassing the platinum precursor ...

Page 102: ...sing is necessary to avoid that the FIB vacuum level exceeds and decreases abruptly when the reservoir valve is opened Outgassing basically consists of a series of open and close cycles to let small amounts of gas out of the reservoir Procedure 1 Switch off the SEM EHT 2 Switch off the FIB EHT 3 Open the Panel Configuration Bar 4 Double click Gas Injection System The Gas Injection System panel ope...

Page 103: ...is closed The FIB gun valve is closed simultaneously 8 Click the Open Time field and enter 2 sec onds 9 Click the Close Time field and enter a value of about 5 to 10 seconds 10 Click the Number of Loops field and enter 5 CAUTION Danger of damaging electron source and ion source Before starting the outgassing procedure Ensure that EHT and FIB EHT are switched off Ensure that SEM Column Valve and FI...

Page 104: ...utgassing panel If after the 5th loop the vacuum has not reached 2 x 10 5 mbar or better which is the pressure necessary for deposition repeat the procedure In this case you should increase the number of loops in future outgassing procedures The outgassing procedure ends automatically If you wish to stop the procedure prematurely click Stop How to continue Continue with selecting deposition condit...

Page 105: ... 1 Switch on the electron beam a Switch on the gun b Switch on the EHT 2 Go to the FIB tab of the FIB Control panel 3 Ensure the FIB Gun Pressure is better than 5 x 10 7 mbar CAUTION Danger of arcing Danger of damaging the ion source Before switching on the ion beam ensure the FIB gun pressure is better than 5 x 10 7 mbar 4 Switch on the ion beam a Go to the FIB tab of the FIB Control panel b Clic...

Page 106: ...here you wish to place the milling object Hold the left mouse button and drag The milling object is displayed on the screen The Shape tab opens 8 Enter the required parameters a Milling Mode Deposition Mode b Width 10 µm c Height 2 µm d Time 300 sec e FrequencyX 20 000 f FrequencyY 1 g Milling Current 30 kV 200 pA h Gas ID Platinum i Gas Wait Time s 5 sec ...

Page 107: ... List All previous milling objects are deleted from the milling list 2 Click Add The current milling object is together with the selected milling conditions added to the milling list The time needed to process the object is shown under the Add button 3 Go to the Options tab 4 Activate the When milling switch to Mill SEM mode checkbox ...

Page 108: ...å 5 To start the deposition go to the Shape tab and click Mill The GIS micro stage is moved automatically to the pre defined position which has been assigned to Platinum The deposition process starts The Mill tab opens which allows you to directly control the deposition process ...

Page 109: ...y 6 Move the GIS micro stage to the park position a Go to the GIS tab b Click Parked The GIS micro stage is driven to the safe park position IMPORTANT If you activate the GIS Auto Park checkbox in the Options tab before starting the deposition step 5 the GIS micro stage is automatically driven to the safe park position ...

Page 110: ...cated Procedure 1 Select an imaging mode e g FIB mode SEM 2 Go to the Detectors tab of the SEM Control panel 3 Select SESI from the drop down menu The SESI detector is operated in SE mode Operating mode Detected signals FIB mode EHT Typical WD Detector settings SE mode Secondary electrons SEM 100 V to 30 kV max 5 mm Collector voltage 0 V to 1500 V Best detection 300 V to 400 V FIB 1 kV to 30 kV co...

Page 111: ...ê íáçå 4 In order to toggle between SE Mode and Ion mode tick untick the ION Mode check box 5 Set the Collector Voltage SESI Control panel Alternatively 1 Open the Panel Configuration Bar 2 Double click SESI Control The SESI Control panel opens 3 Select the desired settings ...

Page 112: ...s are dependent on this reference If you change the reference values all other probe currents will be changed as well IMPORTANT Depending on special customer requirements size and numbering of the apertures may be slightly different You can see that you have selected the reference probe current when the message You cannot delete the reference probe entry is displayed in the FIB Probe Table Range F...

Page 113: ...nstant while the other parameters can be changed in the FIB Alignment panel Possible reasons After having changed the FIB Extractor Target Depending on the operator s experience it may take up to a few hours to run through this proce dure thoroughly Parts special tools required NTS part no Faraday cup 348342 8055 000 Piece of silicon wafer bulk ...

Page 114: ... a probe cur rent 5 Start measuring the specimen current by using the Specimen Current Monitor Panel Configuration Bar Specimen Current Monitor 6 Activate the SCM On and the Spot checkbox 7 Go to FIB Control Align 8 Activate the Modify Condenser checkbox 9 Adjust the FIB Condenser until the desired probe current is measured by the Specimen Current Monitor The condenser value is automatically adopt...

Page 115: ...ne The aperture has been aligned correctly when the image does not shift any more during the focus un focus cycle 12 Re focus the image Use Focus and Stigma tion 13 If the results are not satisfying repeat step 9 with a higher magnification 14 Repeat the procedure for all other probe cur rents 15 In the Align tab deactivate the Modify Con denser checkbox How to continue Adjust the Beam shift corre...

Page 116: ...Precondition Piece of silicon is loaded Probe currents have been adjusted roughly as described for pA probe currents see previous section Procedure 1 Burn a spot into the specimen for about 5 s Use the Spot mode 2 Check the halo 3 If the spot is not round move the aperture one step in one direction 4 Burn a new spot 5 If the halo is reduced continue moving the aperture in this direction If the hal...

Page 117: ...the FIB Control panel Click Backlash Correction 8 Check the spot shape 9 Click Save 10 Repeat the procedure for all other nA probe cur rents 11 If necessary optimise the probe current with the Defocus option refer to section 6 6 6 4 How to continue Adjust Beam Shift correction refer to section 6 6 6 5 ...

Page 118: ...us option Procedure 1 Adjust the probe current as described in section 6 6 6 3 2 Go to FIB Control Align 3 Set the defocus value a Double click in the Mill Defocus field Image Comment The ion beam is focussed resulting in an optimum imaging resolution but the sputter rate is low due to the large halo The focus voltage is reduced by 60 V resulting in poor image quality but the sputter rate is incre...

Page 119: ... each current b Enter a defocus value e g 20V in the Mill Defocus window 4 Activate the Force Defocus checkbox The Defocus value is now applied when using spot mode 5 Burn a spot into the specimen for about 5 s to evaluate the spot quality Use the Spot mode 6 Check the halo 7 Slowly increase the defocus value in 10 V steps ...

Page 120: ...ä ìêáÖ çãé Åí ÉåMP SK léÉê íáçå êçëë_É ã çéÉê íáçå 8 Repeat steps 5 to 7 until the burned spot is round 9 If the correct defocus voltage is reached click Save 10 Deactivate the Force Defocus checkbox Now the adjustment is complete ...

Page 121: ...orrected by using a part of the Beam Shift called Beam Shift correction The 30kV 50 pA probe current is the reference current where no correction is applied IMPORTANT The 50 pA probe current is the reference probe current All focus values and the Beam Shift correction are stored in reference to the 50 pA probe current There fore this probe current must be adjusted first IMPORTANT The Beam Shift co...

Page 122: ...o move the crosshairs click the square in the centre and drag 5 In the FIB Control Align tab select the next smaller probe current from the drop down menu The selected feature moves to a different position 6 To move the selected feature back under the crosshairs use the Beam Shift correction a Click Beam Shift Cor b Move the crosshairs with the sliders or the red dot ...

Page 123: ...his proce dure 10 Select the 30kV 50 pA reference current to check the original position of the crosshairs If necessary move the crosshairs to the original position CAUTION Danger of damaging the specimen Ensure not to damage the specimen while working with high currents 11 Repeat steps 6 to 7 with the next higher probe current 12 Adjust all higher probe currents with this proce dure Now the adjus...

Page 124: ... F1 Alternatively select Help SmartSEM help from the menu The SmartSEM help start window opens If menus are opened in the SmartSEM user interface pressing F1 will open the help text for the respective menu This allows explaining the menu while the workstation is being operated 6 7 1 1 Printing help texts 1 Click the printer icon in the help window If a printer is installed the help text is printed...

Page 125: ...lect Help What s This from the menu The mouse cursor is equipped with a question mark 2 Move the cursor to the area of interest on the screen 3 Click the left mouse button The help text is shown 4 To disable the context sensitive help press ESC 6 7 3 Searching for a topic 1 Select Help Search from the menu 2 Click the Search tab 3 Search for the desired topic ...

Page 126: ...p by step guides The step by step guides provide quick information on important operation sequences 6 7 4 1 Getting started 1 Select Help Getting started from the menu 2 Click the topic of interest 6 7 4 2 Frequently used operation sequences 1 Select Help How To from the menu 2 Click the topic of interest ...

Page 127: ...6 7 5 Calling the short cuts help Many functions and menus which are often used in the SmartSEM user interface can also be opened using the keyboard A list of short cuts key combinations can be displayed in the Smart SEM help 1 Press F9 Alternatively select Help Keys help from the menu ...

Page 128: ...out SmartSEM 6 7 6 1 Version history The Release Notes summarise important information about the software version history New functions bug fixes and special features of the different versions are explained 1 Select Help Release Notes from the menu 6 7 6 2 About SmartSEM 1 Select Help About SmartSEM from the menu ...

Page 129: ...firmation to close the session 2 Confirm by clicking on the Yes button The electron optical parameters are filed in a mac ro in the individual user directory The EM Server remains active 6 8 2 Exiting 1 Select File Exit from the menu A window appears asking for confirmation to close the session 2 Confirm by clicking on the Yes button The electron optical parameters are filed in a mac ro in the ind...

Page 130: ...n and specimen chamber will be maintained STANDBY mode is also the recommended mode to store the workstation In this case activate the Partial Vent on Standby checkbox in the Vacuum tab of the SEM Con trol panel 1 Switch off the EHT 2 Close SmartSEM a Select File Exit from the menu The SmartSEM Close UIF window appears ask ing for confirmation to close the session b Confirm by clicking on the Yes ...

Page 131: ...om the menu A window appears asking for confirmation to close the session b Confirm by clicking on the Yes button The electron optical parameters are filed in a mac ro in the individual user directory 3 Shut down the PC 4 Press the red OFF button The red OFF button lights Computer electronic components and vacuum system are switched off The electron optical column is partially ventilated A 24 V au...

Page 132: ...ency off IMPORTANT Before switching on the workstation ensure that the reason for the emergency off does not exist any more and that it is safe to switch on the workstation 1 Release the EMO button by pulling it If several EMO buttons are installed ensure that all EMO buttons have been released 2 Turn the MAIN switch 1 which is located at the EMO box to position RESET 3 Turn the MAIN switch 1 to p...

Page 133: ...ition 6 Open the main shut off valve for cooling water unless it is already open 7 Open the main shut off valve for compressed air unless it is already open 8 Open the main shut off valve for gaseous nitrogen unless it is already open 9 Press the yellow STANDBY button at the front of the plinth 10 Press the green ON button at the front of the plinth 11 Start the SmartSEM software 12 Initialise the...

Page 134: ...w appears asking for confirmation to close the session b Confirm by clicking on the Yes button The electron optical parameters are filed in a mac ro in the individual user directory 3 Shut down the computer 4 Press the red OFF button The red OFF button lights 5 Turn the Main SWITCH 1 which is located at the EMO box to position OFF The workstation is completely cut off from the mains power supply 6...

Page 135: ...tion Preventive maintenance work Change of consumables and chemicals Equipment test Verification run IMPORTANT The mainenance work will be accomplished according to standardized maintenance plans and will be recorded by the ZEISS service representative 7 2 Maintenance intervals The maintenance intervals depend on the period of application of the device 24 7 annually 8 5 semiannually IMPORTANT Plan...

Page 136: ... There is no warranty on cathodes cathode manufacturers do not guarantee any lifetime Interval Component Part Every 6000 h1 filament on Gun cathode 1 As required or yearly and after cathode exchange Standard multihole aperture Anode aperture Extractor aperture Anode aluminium seal Copper seal at gun head Yearly or as required Pre vacuum pump Yearly SE2 detector In lens detector InlensDuo detector ...

Page 137: ... does not vent No nitrogen No compressed air Check nitrogen supply Check compressed air supply System vacuum Vac ready OK is indicated abnormally fast Penning gauge has not been identified correctly Restart the workstation If this does not solve the problem call your local Carl Zeiss service engineer System vacuum Bad system vacuum Chamber door seal does not seal tightly Check chamber door seal fo...

Page 138: ...quality Image is noisy Noise reduction methods do not remedy Cathode is used up Call the local Carl Zeiss service engineer to have the cathode replaced Image quality Image is bad at low EHT e g 1 kV Working distance is too long Reduce working distance In lens image In lens image is noisy Working distance is too long Reduce working distance In lens image No In lens image EHT exceeds 20 kV Reduce EH...

Page 139: ...gineer 8 2 2 Replacing the chamber door seal Reasons Chamber door does not close tightly bad chamber vacuum CAUTION Suffocation hazard due to lack of oxygen since the specimen chamber is ventilated with nitrogen Avoid inhaling the air from within the specimen chamber Ensure the area around the microscope is sufficiently ventilated IMPORTANT Contamination caused by fingerprints can lead to vacuum d...

Page 140: ...NQM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ Ü ãÄÉê 3 Remove the chamber door o ring 1 4 Insert the new chamber door o ring 5 Close the chamber door Pump the specimen chamber 1 ...

Page 141: ...nance procedure Prerequisite Only advanced operators are allowed to perform the bakeout procedure Baking out requires Supervisor privilege and user access level Service Procedure 1 Select All Shutdown Gun from the status bar in order to switch off EHT and Gun 2 Wait until the Gun has ramped down 3 Use a 3 mm Allen key to remove the four screws at the gun head CAUTION Danger of misaligning the gun ...

Page 142: ... head area with aluminium foil 6 Wrap the high voltage plug in aluminium foil or in an antistatic bag to avoid contamination 7 In the SmartSEM user interface select Tools Goto panel from the menu The Panel Configuration Bar opens 8 Double click on Bakeout The Bakeout dialogue is shown 9 Select one of the different bakeout cycles Quick 2 hours heating 1 hour cooling Overnight 8 hours heating 2 hour...

Page 143: ...eout procedure is running Before you do so ensure that the PARTIAL VENT ON STANDY checkbox is UNTICKED in the SEM Control panel 10 To start the bakeout procedure click on Bake out Start After having finished the bakeout procedure 1 Remove the pieces of aluminium foil CAUTION Danger of misaligning the gun head Ensure not to apply any lateral force when reconnecting the high voltage plug 2 Reconnect...

Page 144: ...e FIB Control Panel opens The life of the ion source is indicated as µAh IMPORTANT When the lifetime of the ion source approaches 1500 µAh you should contact the Carl Zeiss service to have the ion source replaced 8 3 2 2 Regenerating by heating The heating procedure is used if the suppressor voltage has reached 0 V while a probe current of 2 µA cannot be maintained any more or if the ion source do...

Page 145: ...e FIB Gun Presssure must be better than 5 x 10 7 mbar CAUTION Danger of arcing Danger of damaging the ion source Before switching on the ion beam ensure the FIB gun pressure is better than 5 x 10 7 mbar 2 Click on ON to switch on the ion gun CAUTION Risk of damaging the ion source Ensure the FIB gun is switched ON before you start the heating procedure ...

Page 146: ...nt Off 10 Notice the FIB Fil Current value at which the ion source starts emitting 11 Set the FIB Auto Heating Limit a Remember the value at which the ion source has started emitting b Add 500 mA to the value of first emitting and enter this value 12 Set the FIB Min Autoheat Current a Subtract 300 mA to the value of first emitting and enter this value How to continue If you heated manually after u...

Page 147: ...rried out by an electrically skilled person in accordance with national safety regulations Turn off and lock out the workstation before opening the protective cover Reasons Circuit breaker is tripped lower position Procedure 1 Switch off the workstation completely a Turn the ON OFFswitch to OFF position b Unplug the power cord 2 Check the miniature circuit breaker 1 F18 main fuse 16 A AIC 10 000 r...

Page 148: ... F2 T4A IGP power supply F11 T4A Res 1 spare F3 T2A Bakeout heater 1 F12 T4A Res 2 spare F4 T4A Bakeout heater 2 F13 T2A Mains PSU Vac supply voltage F5 T4A Spare VP microscope RBV F14 T4A Turbo pump power supply and angle valve F6 T4A EHT F15 T0 2A Main input 230 24 V F7 T4A PC F16 T10A Rotary pump and fuse F14 F8 T4A Not connected F17 T15A Mains PSU stage and EO supply voltage F9 T4A EDX Table 8...

Page 149: ...çíáåÖ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NQV çÑ NSQ mçïÉê ÅáêÅìáí 6 Mount the protective cover 7 Tighten the screws 1 8 Plug in the power cord 9 Turn the ON OFF switch to ON position 10 Restart the workstation 1 1 ...

Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...

Page 151: ...on put out of operation The service engineer will see to that the cooling water is completely removed from the interior of the FESEM 9 2 Disposal 9 2 1 Disposing of solid waste consumables The operator must ensure that solid waste consumables is disposed of and recycled in a respon sible manner Description Material Disposal Schottky field emitter gun Tungsten ceramics To be returned to Carl Zeiss ...

Page 152: ...n ner Refer to EC directive 2002 96 EC on waste electrical and electronic equipment WEEE The workstation consists of several modules Be careful to separate the materials properly when you dispose of the workstation Materials e g metals non metals composite materials process materials Electronic scrap material e g transformers circuit boards cables Comply with national and regional waste disposal o...

Page 153: ...rture standard multihole aperture 348520 0613 000 Anode aperture 110µm 348520 6010 000 Closed anode 349520 0029 000 Spacer 349520 0038 000 Code pin 345920 0028 000 Liner Tube complete consisting of Aperture holder Aperture nut Nut O ring Liner Tube 346820 8087 000 348520 0567 010 348520 0082 100 504 521 349520 0031 000 Extractor aperture 348520 0097 001 Anode aluminum seal 348520 0609 000 Copper s...

Page 154: ...ls and accessories Item Part no Set of fuses 348200 8801 000 Chamber door o ring 113 880 Item Part no 3 mm Allen key 0015 247 1 5 mm Allen key 151 883 Small pliers Sample holders Refer to sample holder catalogue Stubs Tweezers TEM oil 300 0484 955 Isopropanol Cloth lint free Gloves lint free Aluminium foil or antistatic bag ...

Page 155: ...on EMC Electromagnetic compatibility EMO Emergency off EsB Energy selective backscattered FESEM Field emission scanning electron microscope GUI Graphical user interface H Height IGP Ion getter pump M M axis MSDS Material safety data sheet PC Personal computer PE Protective earth R R axis SE Secondary electron SESI Secondary Electrons Secondary Ions SI Secondary ion T T axis U Voltage UIF User inte...

Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...

Page 157: ...ement of the specimen Charge Compensator Equipment that allows you to minimise charging effects by emitting a local flow of gaseous nitrogen onto the area of interest on the specimen sur face Emission image Special beam profile mode used to adjust the cathode The emission image is a shadow image In lens image of the multihole aperture holes generated by scanning the electron beam above the multi h...

Page 158: ...bsorbs electrons and in response fluoresces photons while releasing the previously absorbed energy Primary electrons Narrowly bundled beam of accelerated electrons that hit the specimen surface X ray Type of ionising radiation that is generated during the operation of elec tron microscopes ...

Page 159: ...ufacturer Carl Zeiss Microscopy GmbH Carl Zeiss Str 22 73447 Oberkochen Germany EC Directives 2006 42 EC Machinery Directive 2004 108 EC Electromagnetic Compatibility Applied harmonised standards EN 60204 1 2006 Safety of machinery Electrical equipment of machines Part 1 General requirements EN 61010 1 2010 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use EN ...

Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...

Page 161: ...ctors 39 Diamond like carbon layers 83 Disposal 151 Documents related 7 Dose rate 14 Drift 138 Dual joystick 26 30 E EHT 35 Electron beam deposition 83 Electron beam etching 83 Emergency off 132 138 EMO button 20 Etching 83 Evacuating 33 Exhaust line 47 F Faraday cup 113 FIB Auto Heating 90 FIB Daily Adjust 93 FIB imaging 38 FIB Mode 38 FIB probe currents 89 FIB Suppressor Target 89 Filament 34 Fi...

Page 162: ...urrents 37 Progress marker 98 Protection class 47 Protective ground 47 R Radiation 14 Radiation protection 14 Relative humidity 48 Resolution 44 46 Room size 47 S Safety 8 11 14 Safety devices 18 Safety instruction 8 Safety labels 21 Schottky field emitter 34 Scintillator 136 158 SE2 detector 39 41 SEM imaging 38 Service 13 14 137 Service area 47 SESI detector 39 Shutdown 151 SmartSEM 10 Software ...

Page 163: ...fåëíêìÅíáçå j åì ä rofd çãé Åí ÉåMP NSP çÑ NSQ NQK fåÇÉñ W Water 83 Water flow rate 48 Water temperature 48 WD 40 WEEE 152 Wobble 76 Working distance 40 X X rays 14 22 ...

Page 164: ...e Cambridge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microscopy Due to a policy of continuousdevelopment we reserve the right to change specifications without notice Carl Zeiss Microscopy GmbH ...

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