![background image](http://html.mh-extra.com/html/zeiss/auriga-compact-crossbeam/auriga-compact-crossbeam_instruction-manual_927491109.webp)
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The deposition process ends automatically.
6
Move the GIS micro stage to the park position:
a
Go to the
GIS
tab.
b
Click
Parked
.
The GIS micro stage is driven to the safe park
position.
IMPORTANT
If you activate the GIS Auto Park checkbox in the Options tab before starting the deposition
(step 5), the GIS micro stage is automatically driven to the safe park position.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...