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3.5. Specification
3.5.1. Workstation
Performance
Resolution
1.2 nm at 15 kV and optimum working distance
2.5 nm at 1 kV and optimum working distance
Acceleration voltage
0.1 V - 30 kV
Probe current
4 pA - 100 nA with integrated High Current - Depth of Field module
Magnification
12 - 1.000.000 x
Electron optics (GEMINI
®
column)
Electron source
Schottky field emitter
Lens control
Patented GEMINI
®
electromagnetic/electrostatic objective lens system (68°
conical final-lens) with water cooling for best thermal stability and reproduci-
bility
Stigmator
Eight pole electromagnetic
Apertures
Seven apertures with electromagnetic selection.
Beam Shift
Width: max. 15 µm depending on EHT and WD
Extended Beam Shift width: ±100 µm depending on EHT and WD
Specimen chamber and stage
AURIGA
®
Compact
Specimen chamber
Dimensions
330 mm inner diameter
270 mm height
Accessory ports
15
Specimen stage
Type
6-axes motorised super
eucentric, controlled via
SmartSEM
®
software
Specimen weight
Up to 0.5 kg
Movement
X = 100 mm
Y = 100 mm
Z = 55 mm
M = 10 mm
T = -10° to 70°
R = 360° continuous
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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