Zeiss AURIGA Compact Crossbeam, Instruction Manual

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3.4.5. Signal detection
The interaction products most frequently used for the generation of images in scanning electron
microscopy are secondary electrons (SEs) and backscattered electrons (BSEs). For the separa-
tion and detection of SEs and BSEs one has to consider two parameters: Energy and angle dis-
tribution.
For that purpose the InlensDuo detector has been developed.
Detector type Detected
signals Availability Typical application Reference
In-lens detector
(annular SE detector)
SE Standard Surface structure See section 3.4.5.1.
SE2 detector
(Everhart-Thornley type)
SE2 Standard Topography See section 3.4.5.2.
InlensDuo detector with filtering
grid (in-column detector)
BSE Option Pure material contrast See section 3.4.5.3.
SESI detector SE, SI,
(BSE) Option Topography, material con-
trast See section 3.4.5.4.
Further detectors on request.