NQS=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
UK=qêçìÄäÉëÜççíáåÖ
`çäìãå
3
Click on
Heating
.
4
The
FIB Filament Heating
panel opens.
5
Enter
FIB Fil I Target
=
2.5
A.
6
To start the heating procedure, click on
Filament On
.
7
While watching the emission, wait about 10 sec-
onds.
8
If there is no emission, slowly increase the
FIB Fil I Target
by
100 mA
steps until the
emission begins and the suppressor target
starts regulating towards
0
.
9
When the suppressor voltage is well
between
0
and
-1000 V,
or when the emission is
increasing rapidly, stop the procedure:
Click on
Filament Off
.
10 Notice the
FIB Fil Current
value at which the
ion source starts emitting.
11 Set the
FIB Auto Heating Limit
:
a
Remember the value at which the ion
source has started emitting.
b
Add
500 mA
to the value of first emitting and
enter this value.
12 Set the
FIB Min..Autoheat Current
:
a
Subtract
300 mA
to the value of first emitting
and enter this value.
How to
continue
If you heated manually after using auto heating five
times or if the suppressor voltage has reached
-2000 V while a probe current of 2 µA cannot be
maintained any more:
•
Continue with initialising the FIB apertures (see
section 6.6.1.3. step 7).
If you heated manually because the ion source does
not start emitting:
•
Contact the local Carl Zeiss service if the emis-
sion current does not increase again.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...