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9. Shutdown and disposal
9.1. Putting the workstation out of operation
If the workstation will not be used for an extended period of time e.g. several months, it should be
put out of operation.
Contact your local Carl Zeiss service engineer to have the workstation put out of operation.
The service engineer will see to that the cooling water is completely removed from the interior of
the FESEM.
9.2. Disposal
9.2.1. Disposing of solid waste (consumables)
The operator must ensure that solid waste (consumables) is disposed of and recycled in a respon-
sible manner.
Description
Material
Disposal
Schottky field emitter, gun
Tungsten, ceramics
To be returned to Carl Zeiss.
Apertures
Platinum, iridium, gold
Very small amounts.
May be disposed of in accordance with
local/regional regulations.
Ion source (gallium)
Gallium
To be returned to Carl Zeiss.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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