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11 Wobble the aperture:
a
Select
ON Focus
from the drop-down menu.
b
Move the aperture: Use the buttons in the
Aperture Steps
field. Use only
Medium
or
Fine
.
The aperture has been aligned correctly when the
image does not shift any more during the focus/un-
focus cycle.
12 Re-focus the image: Use
Focus
and
Stigma-
tion
.
13 If the results are not satisfying, repeat step 9
with a higher magnification.
14 Repeat the procedure for all other probe cur-
rents.
15 In the
Align
tab, deactivate the
Modify Con-
denser
checkbox.
How to
continue
Adjust the Beam shift correction (refer to section
6.6.6.5.).
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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