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8.2. Chamber
8.2.1. Initialising the stage
If a stored stage position cannot be approached or if absolute stage movement is required, the
stage needs to be initialised.
Prerequisite
•
Executing this function requires the
Stage initialise
privilege in the user profile.
•
Specimen chamber has been evacuated.
Procedure
1
On the menu, select
Stage/Stage initialise
.
2
In the window
SmartSEM
, click
Yes
.
IMPORTANT
If initialisation of the stage does not solve the stage problem, contact your local
Carl Zeiss service engineer.
8.2.2. Replacing the chamber door seal
Reasons
•
Chamber door does not close tightly, bad chamber vacuum
CAUTION
Suffocation hazard due to lack of oxygen, since the specimen chamber is ventilated with
nitrogen.
Avoid inhaling the air from within the specimen chamber.
Ensure the area around the microscope is sufficiently ventilated.
IMPORTANT
Contamination caused by fingerprints can lead to vacuum deterioration or prolonged
pumping times.
Always wear lint-free gloves when touching specimen, sample holder or stage. Keep the
chamber door open as short as possible.
Procedure
1
Ventilate the specimen chamber.
2
Open the chamber door.
CAUTION
Risk of damaging the sealing surface when using metallic tools.
If required, use a plastic or wooden tool to remove the chamber door o-ring.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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