Zeiss AURIGA Compact Crossbeam, Instruction Manual

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IMPORTANT
From time to time, the gallium emitter has to be regenerated by heating. The heating pro-
cedure removes the gallium oxide which has been created during operation or during
longer breaks.
In general, it is recommended that you activate the automatic heating function. This will ensure
that the ion source is heated automatically if required.
6 Regenerate the ion source:
Heating
automatically
a Activate the FIB Auto Heating checkbox.
CAUTION
Risk of instabilizing the ion source due to incessant automatic heating.
To ensure optimum operation, the ion source must be heated manually at regular
intervals.
The manual heating will be required after having performed the Auto Heating for about 5 times,
i.e. about every 2 - 3 weeks. However, this interval is dependend on the usage of the workstation.
All Auto Heating cycles are listed in the log file of the EM Server.
Heating
manually
a Check the number of Auto Heating cycles in
the EM Server.
b After every fifth Auto Heating cycle heat
manually.
Refer to section 8.3.2.2. regenerating the
ion source by heating manually.