![background image](http://html.mh-extra.com/html/zeiss/auriga-compact-crossbeam/auriga-compact-crossbeam_instruction-manual_927491032.webp)
PO=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
PK=aÉëÅêáéíáçå
mêáåÅáéäÉ=çÑ=çéÉê~íáçå
3.4. Principle of operation
3.4.1. Vacuum system
For operation of the workstation, gun head (
10
), column and specimen chamber have to be evac-
uated. The vacuum is essential to operate the gun and to prevent collision of electrons and/or ions
with gas molecules.
Fig. 3.2: Schematics of the vacuum system
System
vacuum
Pre-vacuum pump (
5
) and turbo pump (
6
) evacuate the specimen chamber. The vacuum in the
specimen chamber is measured by a Penning gauge (
4
). The detected vacuum values are shown
as ’System vacuum’ in the SmartSEM
®
user interface. As long as the detected pressure in the
specimen chamber is not ready for operation, the column chamber valve (
8
) is closed in order to
separate the specimen chamber from the column.
1
Gun with filament
6
Turbo pump
2
Ion getter pumps (IGP)
7
Vent valve
3
Specimen chamber
8
Column chamber valve
4
Penning gauge
9
Multihole aperture
5
Pre-vacuum pump
10 Gun head
2
1
9
3
5
4
8
6
7
10
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...