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3.5.2. FIB column
IMPORTANT
For more details refer to the document Product Specification AURIGA
®
Compact.
Performance
Resolution
< 5 nm at 30 kV
Acceleration voltage
1 - 30 kV
< 5 kV as an option
Probe current
1 pA - 50 nA
Magnification range
300 x - 500,000 x
Ion optics
Ion source
Gallium liquid metal ion
source
Lenses
Two electrostatic lenses
Stigmator
Eight pole electrostatic
Apertures
7 apertures, motorized
Beam Shift
±7 µm
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...