SK=léÉê~íáçå
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí
=
ÉåMP
=NNV=çÑ=NSQ
`êçëë_É~ã
®
çéÉê~íáçå
IMPORTANT
The defocus value is different for each current.
b
Enter a defocus value, e.g.
20V
in the
Mill Defocus
window
4
Activate the
Force Defocus
checkbox.
The Defocus value is now applied when
using spot mode.
5
Burn a spot into the specimen for about
5 s
to
evaluate the spot quality:
Use the
Spot
mode.
6
Check the halo.
7
Slowly increase the defocus value in
10 V
steps.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...