![background image](http://html.mh-extra.com/html/zeiss/auriga-compact-crossbeam/auriga-compact-crossbeam_instruction-manual_927491113.webp)
SK=léÉê~íáçå
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí
=
ÉåMP
=NNP=çÑ=NSQ
`êçëë_É~ã
®
çéÉê~íáçå
Preparing the
adjustment
The extraction current should be kept constant while the other parameters can be changed in the
FIB Alignment
panel.
Possible reasons:
•
After having changed the FIB Extractor Target
Depending on the operator’s experience it may take up to a few hours to run through this proce-
dure thoroughly.
Parts/special tools required
NTS part no.
Faraday cup
348342-8055-000
Piece of silicon wafer (bulk)
-
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...