Zeiss AURIGA Compact Crossbeam, Instruction Manual

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8.3.2. Ion source (Workstation with FIB)
8.3.2.1. Checking the lifetime
The ion source is a consumable that is used up during operation.
In order to have a clue of the ion supply you should check the ion source lifetime.
Procedure
1 Select FIB from the FIB drop-down menu.
The FIB tab of the FIB Control Panel opens.
The life of the ion source is indicated as µAh .
IMPORTANT
When the lifetime of the ion source approaches 1500 µAh you should contact the Carl Zeiss
service to have the ion source replaced.
8.3.2.2. Regenerating by heating
The heating procedure is used
•
if the suppressor voltage has reached 0 V while a probe current of 2 µA cannot be maintained
any more or
•
if the ion source does not start emitting.
Prerequisite
•
Requires the Supervisor privilege.
•
To be performed only by specially trained advanced operators.
•
Requires user level Service .