NQO=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
UK=qêçìÄäÉëÜççíáåÖ
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4
Remove the high voltage plug:
a
Take hold of high voltage line and high
voltage plug.
b
Pull it upwards.
CAUTION
Danger of contamination
Ensure to properly cover gun head area and high voltage plug.
5
Cover the gun head area with aluminium foil.
6
Wrap the high voltage plug in aluminium foil or
in an antistatic bag to avoid contamination.
7
In the SmartSEM
®
user interface,
select
Tools/Goto panel
from the menu.
The
Panel Configuration Bar
opens.
8
Double-click on
Bakeout.
The
Bakeout
dialogue is shown.
9
Select one of the different bakeout cycles:
Quick
: 2 hours heating / 1 hour cooling
Overnight
: 8 hours heating / 2 hours cooling
Weekend:
40 hours heating / 3 hours cooling
User
: To be defined by the operator
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...