Zeiss AURIGA Compact Crossbeam, Instruction Manual

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6.6.3. Recording images during milling
When selecting the imaging mode Mill+SEM , images can be saved any time during milling. How-
ever, the images may be interfered by the ion beam.
To avoid any interferences, you can pause the milling while you are taking an image.
1 To record a FIB image, click Grab FIB Frame .
Grabbing a FIB image provides an orthogonal
view onto the specimen surface.
2 To record a SEM image, click Grab SEM
Frame .
Grabbing a SEM image provides a sharp im-
age, since the milling is paused.
When clicking one of the Grab...Frame buttons,
the milling is stopped, while the image is recorded.
After having finished the grabbing, the milling con-
tinues, but the image remains frozen.
To continue imaging, go to the Scanning tab of the
SEM Control panel and click Unfreeze .