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3.4.4. Ion optics (FIB column)
Fig. 3.4: Schematics of the ion optics
The focused ion beam (FIB) column is the part of the CrossBeam
®
workstation, where ions are
emitted, accelerated, focused and deflected.
The FIB column is tilted by 54°.
Ion source
A liquid metal ion source of gallium (Ga
+
) serves as ion source (
1
).
Gallium ions (Ga
+
) are extracted from a liquid metal ion source. The ions are accelerated by the
acceleration voltage to an energy of maximum 30 keV. The ion emission is regulated by the ex-
tractor and stabilised by the suppressor.
Gallium is used up during operation. Therefore, the gallium emitter cartridge is a consumable.
Moreover, the gallium emitter has to be regenerated by heating from time to time; the heating pro-
cedure removes the gallium oxide, which has been created during operation.
1
Ion source (Ga
+
)
4
Objective lens
2
Variable apertures
5
Specimen
3
Ion beam
5
4
3
2
1
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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