![background image](http://html.mh-extra.com/html/zeiss/auriga-compact-crossbeam/auriga-compact-crossbeam_instruction-manual_927491055.webp)
SK=léÉê~íáçå
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí
=
ÉåMP
=RR=çÑ=NSQ
pïáíÅÜáåÖ=çå=íÜÉ=ïçêâëí~íáçå
6. Operation
At a glance
This chapter contains information about:
•
Switching on the workstation
•
Starting the SmartSEM
®
user interface
•
Finding your way in the SmartSEM
®
user interface
•
SEM operation
•
Electron beam deposition or etching (with GIS upgrade only)
•
CrossBeam
®
operation
•
Using the help functions
•
Closing the SmartSEM
®
user interface
•
Switching off the workstation as a matter of routine
•
Emergency off
•
Switching off the workstation completely
6.1. Switching on the workstation
Preconditions:
•
Workstation is in
STANDBY
mode
1
Press the green
ON
button (
1
) that is located
at the front of the plinth.
1
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...