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Maintenance
procedures
Baking out the gun head has to be performed as a regular maintenance procedure.
Only advanced operators are allowed to perform the bakeout procedure.
CAUTION
Burn hazard
Some parts inside the workstation will get hot during the bakeout procedure.
Do not place any combustible objects on the grids of the electron optical column.
2.3.2. Hazards not related to personal injury
CAUTION
Risk of property damage when opening the chamber door.
Workstation or specimen could be damaged if specimen stage is at short working dis-
tance.
Always move specimen stage to long working distance before opening the chamber door.
CAUTION
Risk of property damage
Connect Carl Zeiss approved equipment only.
Ensure the total load connected to the workstation does not exceed 10 A.
IMPORTANT
Fingerprints can cause virtual vacuum leaks.
Always wear lint-free gloves when touching the specimen or inner parts of the specimen
chamber.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...