M-2000® Hardware Manual
©2023 J.A. Woollam Co.
21
Computer
The computer operates the CompleteEASE data acquisition and analysis
software. The main function of this computer is to communicate with the
remote computer located within the electronics control module. It also analyzes
all data acquired from the embedded computer and displays the results on the
computer screen.
Surge Suppressor
The system is shipped with either 110 or 220V surge suppressor(s). These are
provided to condition and filter the input AC power for the ellipsometer and to
provide a central location for the system’s AC power.
USB Camera (Optional)
The system may be shipped with an optional high resolution USB color camera.
This camera comes with a multi-element lens attached or alignment optics. The
CompleteEASE software allows the user to view and capture color images from
the camera.
Auto-Angle ESM-300 Base Unit
The M-2000 spectroscopic ellipsometer system on the auto-angle base comes in
three sizes depending on the mapping stage (if present).
A small auto-angle base is used for systems with no mapping or a small
manual mapping stage.
A medium auto-angle base is used for systems with 100-200mm mapping
stage.
A large auto-angle base is used for systems with 300mm mapping.
The auto-angle base may also come with an optional rack mount table.
The base is for ex-situ use only. It brings together the Sample Stage, Source Unit,
and Receiver Unit. It is used for calibrating, sample mapping, and taking data at
various angles.
Summary of Contents for M-2000
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