J.A. Woollam M-2000, Hardware Manual

Page: 57 / 178

M-2000® Hardware Manual ©2023 J.A. Woollam Co. 57
Figure 4-9. MQD-Dual filter wheel selection.
Sample Alignment
Sample alignment is required for each new sample to align the sample surface
with respect to the ellipsometer. This is done by adjusting (manually or
automatically) sample chuck tip/tilt and Z-Height.
System Check (Calibration)
A System Check must be performed every time the M-2000 hardware is re-
mounted on the ex situ base or in situ chamber. This is required to determine
the azimuthal angles of the polarizer, compensator, and analyzer optical
elements with respect to the plane of incidence. This step also determines the
in-plane and out-of-plane window effects when the system is mounted on a
chamber with windows present. The system will automatically fit the data to the
calibration wafer model. This confirms that the ellipsometer is working properly.
POSITION INTENSITY
I 100%
II 70%
III 50%
IIII 20%