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©2023 J.A. Woollam Co.
M-2000® Hardware Manual
8.1
Marking the Measurement
Beam Position
Note:
This is only necessary once, unless the configuration files have been
lost (done at the factory setup). The Camera adjustment should be
done so the measurement beam is positioned on the center of the
camera image.
1.
Align the 25nm calibration wafer on the standard sample stage. The
Sample Tilt position is now set.
2.
Flip the sample over so the rough side is facing up, or use a glossy
business card (recommended). If the business card is used, place it on
sample stage. Then, perform an intensity-based (Automatic-Quick) Z
height alignment (be sure to SKIP the tilt alignment).
Figure 8-2. Sample Alignment – Intensity-based Z only.
3.
Select
Hardware
>
Controls
>
Misc
>‘Additional Camera Functions’ to open
the Camera Functions Window. Select ‘Mark Measurement Beam
Location’. This is going to be used to set the “beam size” and not the
“beam position.” Use the appropriate camera adjustment so the beam
position remains in the center of the image.
Figure 8-3. Additional Camera Functions – Mark Measurement Beam Location.
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