M-2000® Hardware Manual
©2023 J.A. Woollam Co.
117
The Scan Pattern Editor contains all options available for Scan Patterns including
sample size (
Substrate Dimensions
), mapping locations (
Point List
) alignment
options (
Alignment Position
), scan offsets (
Pattern Offset
), and more.
Substrate Dimensions
The substrate dimensions can be drawn as a Circle or Rectangle. For circular
substrates, the diameter must be entered, and a Wafer Notch can be added if
applicable.
For rectangular substrates, the X and Y dimensions must be entered. Scan
Patterns for rectangular substrates can be easily set with (0,0) position at the
center of the sample, or at the corner of the sample.
Figure 7-5. Options for Substrate Dimensions.
Figure 7-6. Circular sample 10cm diameter.
Point List and Point Commands
The
Point List
panel is used to add mapping locations to the Scan Pattern. Points
can be added one at a time, or using a fixed spacing and grid style.
To add points one at a time, or from a preset list of coordinates, simply click ‘Add
Point’. A measurement point is added using X and Y coordinates or the current
Translator position. A list of coordinates created in another program can also be
added using the ‘Paste From Clipboard’ button.
Summary of Contents for M-2000
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