J.A. Woollam M-2000, Hardware Manual

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84 ©2023 J.A. Woollam Co. M-2000® Hardware Manual
Figure 4-60. Cross hair example – Receiver Camera installed.
7. Select Cancel Alignment (or press ESC) to exit the screen. The system will
perform an auto Z height search to find the maximum intensity. If an
accurate sample height was entered into Sample Alignment dialog box
(see Figure 4-58), the alignment is likely complete. If not, these steps
may need to be repeated (iterate tip/tilt and Z height search) until the
sample is properly aligned. The software will enforce this action if
necessary. Two conditions must be simultaneously met for successful
sample alignment:

The sample surface must be perpendicular to the plane defined by
the optical axes of the source and receiver (sample tip/tilt alignment).

The sample surface must be positioned such that the light is reflected
into the Receiver Unit aperture (sample height alignment).
4.8 Sample Alignment (with
Automated Tip/Tilt)
Note: Automated Tip/Tilt alignment is an optional accessory that may or
may not have been purchased with your system. If your purchase
did not include Automated Tip/Tilt, please see Section 4.5 System
Alignment (with Manual Tip/Tilt).
Note: This procedure must be performed every time a sample is mounted
on the ellipsometer, prior to measurement or calibration.
Sample alignment on an auto-angle base with Automated Tip/Tilt alignment is
very simple.
1. Place the reference sample supplied with the instrument (~25nm SiO2 on
Si) on the sample stage.
2. Select Hardware > Controls > General >‘Align Sample’
3. Choose Automatic for Tip/Tilt. If sample thickness is known, enter this
value in the Sample Alignment dialog box and select “Automatic-Quick”.