168
©2023 J.A. Woollam Co.
M-2000® Hardware Manual
established. This can be verified by viewing the log file (
Options
>
About
CompleteEASE
>‘View Error Log’).
Example:
2009-6-23 [12:52:24] - initSocket Error, Connection timed out: connect
Compare the IP address displayed in the error message box with the one
displayed on the LCD on the EC front panel. If they are different, correct one
displayed on the EC to match the other one by following the procedures
described in Section 3.2 Electronics Control (EC) Module Setup.
If there are two network cards in the operator’s computer, make sure
that the other network card has a different IP address than the one used
for the ellipsometer.
Check the IP settings on the network card for ellipsometer in the
operator’s computer as described in Section 3.3 Operator Computer
Setup.
12.3
General Problems
SYMPTOM
CAUSE
SOLUTION
The cross hair
on the
alignment
screen jumps
around during
System
Alignment or
Sample
Alignment
Misalignment
Perform System Alignment or Sample Alignment
procedures described in this manual. The cross
hair becomes stable only if there is signal. If
there is no light hitting the detector, the cross
hair will be jumpy. Therefore, when performing
the alignment, the first step is to make sure
there is light hitting one or more of the four
quadrants by looking at the intensity (grey area)
on the screen. Ignore the cross hair position
until all 4 quadrants receive some amount of
the light.
No white light
Check lamp and light problems chart.
One or more
motors do not
turn.
Loose connection Check all cable connections.
Blown fuse
Check fuses on the EC.
Bad Motor Driver
in EC
Check/Replace Driver. This can be verified by
looking at the drivers to see if there are red
LEDs next to drivers. If so, the driver may be
defective.
Alignment not
sensitive to the
sample tilt.
The sample is not
properly aligned
Re-align the sample, ensuring that the beam is
centered on the aperture of the receiver unit.
Use of optional Focusing attachment reduces
sensitivity to sample tilt.
Table 12-1. General problems.
Summary of Contents for M-2000
Page 2: ...2 2023 J A Woollam Co M 2000 Hardware Manual...
Page 4: ......
Page 9: ...M 2000 Hardware Manual 2023 J A Woollam Co ix...
Page 10: ......
Page 50: ......
Page 152: ...152 2023 J A Woollam Co M 2000 Hardware Manual...
Page 172: ......
Page 175: ...M 2000 Hardware Manual 2023 J A Woollam Co 175 M 2000V I M 2000X I...
Page 177: ...M 2000 Hardware Manual 2023 J A Woollam Co 177...