IPG IX-6168-PS, Справочник по аппаратуре

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Pneumatic Components
6-4
Manifold Solenoids
The amount of manifold solenoids varies based on the options purchased for the
system. There can be up to 6 manifold solenoids and 4 high-purity solenoids. Every
system has a solenoid for the beam stop, air bearing motion stage, vacuum, process
purge and a beam delivery system purge. Some systems may also have spare
solenoids.
Manifold solenoids share the same input and have pressure regulators. They are used
for the beam stop, the purge head, a beam deflector and possible spares. Each one
incorporates a built-in regulator to set the pressure for its device.
Figure 50: Manifold Solenoids—typical configuration—functions may vary
To adjust a manifold-type regulator:
1. Loosen the locking nut.
Manifold Solenoid Assignment
SOL 2 Beam Stop
SOL 6 Spare
SOL 8 Spare
SOL 9 Spare
SOL 10 Spare
SOL 7 Spare