Pneumatic Components
6-6
to control the purge gas. The purge panel is mounted above the pneumatics panel, as
shown in Figure 47 on page 6-2.
The purge panel typically contains several flow meters and valves for monitoring and
adjusting gas
flow
. It may also contain one or more pressure gauges and regulators for
monitoring and adjusting gas
pressure
. Refer to Figure 53 on page 6-6.
Figure 53: Typical Purge Panel
Flow
Meters
Pressure
Regulators
Содержание IX-6168-PS
Страница 1: ...IX 6168 PS Laser Micromachining System Hardware Reference Guide...
Страница 26: ...Safety 1 20...
Страница 32: ...System Overview 2 6...
Страница 40: ...Starting and Shutting Down 3 8...
Страница 66: ...Pneumatic Components 6 10...
Страница 88: ...Electronic and Computer Components 7 22...
Страница 108: ...Ventilation and Debris Control 10 6...