IPG IX-6168-PS, Справочник по аппаратуре

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Part Handling System
9-6
Motion Stages
One or more motion stages move the part under computer control using high-
precision electric motors and mechanical components. All systems have an X-Y
motion stage. The chuck or another stage mounts on top of the X-Y stage:
Figure 83: Chuck and Motion Stage Configurations
X-Y Motion Stage
The X-Y motion stage mounts directly to the granite base. It uses two linear motors to
move the chuck along the horizontal X and Y axes with 0.1

m precision.
Some models use ball bearings, and others use air bearings. The range of movement
along each axis varies. Each stage comes with documentation describing its features
and specifications.
The X-Y stage provides the base for the vacuum chuck or another motion stage.
Z-Theta Motion Stage
The Z-theta motion stage mounts on top of the X-Y stage, and the vacuum chuck in
turn mounts on top of the Z-theta stage.
This stage controls both Z-axis vertical movement and theta-axis rotation around the
vertical axis. Some rare systems do not need Z-axis movement and use a stage that
provides only theta-axis rotation.
X-Y
Motion Stage
Z-Theta
Motion Stage
Vacuum Chuck
X-Y
Motion Stage
Vacuum Chuck
X-Y
Motion Stage
Spindle Chuck
& Motion Stage