6-9
Pneumatics Diagram
Pneumatics Diagram
The specific pneumatics diagram for each workstation is shipped with the system.
Figure 56: Pneumatics Diagram
TH
IRD
A
N
G
LE PRO
JECT
IO
N
VACUUM
X AXI
S STAGE
Y STAGE
CHUCK
REGULATOR
3
1
2
EXB
EXA
BA
IN
REGULATOR
PLU
G
RO
TO
M
E
TE
R
RO
TO
M
E
TE
R
RO
TO
M
E
TE
R
REGULATOR
RO
TO
M
E
TE
R
EXB
EXA
BA
IN
REGULATOR
EXB
EXA
BA
IN
REGULATOR
RO
TO
M
E
TE
R
PL
U
G
REGULATOR
REGULATOR
BALLAST
TANK
PLU
G
EXB
EXA
BA
IN
PLU
G
EXB
EXA
BA
IN
REGULATOR
PLU
G
PLU
G
PLUG
PLU
G
PLU
G
PLU
G
SO
L 6
KO
BY
0.5 MIC
RO
N
STA
GE A
IR
FILTER
SO
L 1
MANIF
OLD
SO
L 7
VA
C
UUM C
H
UC
K
PURGE
VA
C
UUM
5-7 BA
R
FILTER
RELEASE
CLE
AN, DRY
AI
R
PRESSURE
B
LACK
-SE
E
NOT
E
1
KO
BY
P
R
OF
IL
OME
TE
R B
E
AM
DEF
LECT
IA
P
CH
U
C
K
RED-SEE N
O
TE 1
SPA
RE
SW
ITCH
BDS PURGE SOURC
E GA
S
SO
L 8
LIFT MEC
HA
N
ISM
SO
L 10
PLUG BO
TH PO
RTS IF
VA
LVE
EXH
VA
C
UUM C
H
UC
K
C
O
N
F
ETTI C
A
TC
HER
IN
OUT
NO I
N
ST
AL
LE
D
SHUT O
F
F
FILTER
FILTER
SOURC
E
SO
L 5
BDS
MICRO
FILTER
GREEN-SEE NOTE 1
SO
L 9
REGULATOR
SW
ITCH
VA
C
UUM
(SYSTEM O
P
TIO
N
)
R1
PRESSURE
.
IN
TE
RF
ACE
P
A
NE
L
BEA
M STO
P
(SYSTEM O
P
TIO
N
)
SO
L 2
PURGE PA
N
E
L
NOT
E
S
:
PLUMB SYSTEM USIN
G THE FO
LLO
W
IN
G
PN
EUMA
TIC
S
1.
TUBIN
G C
O
LO
R C
O
DE PER STN
0015:
AIR - BLACK
BDS- GREEN
PROC
ESS GAS - BLUE
VA
C
UUM - RED
PLUG "B" PO
RT O
N
UN
USED SO
LEN
O
IDS
2.
VA
C
UUM
A
B
EXA
V
ACUUM
NEED
L
E
EX
HAUST
SENSOR
A
IR PREP A
SSEMBLY A
00752
PR
O
C
ESS
PA
N
E
L
ZON
E
1
BLACK
CLEAR
ZON
E
2
ZON
E
3
ZON
E
4
SO
L 3
IS
OLA
TOR P
LA
TE
IN
EXB
BE
AM
IA
P IN
TERFA
C
E
RE
V
IS
IO
N
S
ECO
R
EV.
D
E
S
C
R
IP
TI
O
N
D
A
TE
E
N
G
2967
1
INI
TI
A
L R
E
LEA
S
E
08/
20/
2009
R
R
H
3636
2
R
ENU
MBER
ED
SOLENOID
S
, AD
D
E
D
OP
TI
ONS
6/30/2010
JH
F
3804
4
A
D
D
E
D
P
N
EU
MAT
IC LINES COLOR
COD
ING
9/24/2010
SVP
4073
5
A
D
D
CH
U
C
K
P
U
F
F
CIR
C
U
IT
2
/1/2011
JH
F
4494
6
R
E
MOVE IX
6100 SCH
EMAT
IC.
E
-D
ESIGNAT
E MANIF
O
LD
SOLENOID
S
P
E
R
ST
D
IX
6600 CONFIGU
R
AT
ION D
O
C
10/26/2011
SVP
4735
7
RE
V
ISE
NO
TE
S TO
SPE
C
IFY G
R
E
E
N
AS BD
S PU
RG
E
, AND
BL
U
E
AS PRO
C
E
SS PU
RG
E
5/18/2012
SVP
5096
8
RE
-L
O
C
ATE
V
A
CU
U
M
RE
LE
ASE
SO
LE
NO
ID
SO
L 7 TO
RE
FL
E
C
T ACTU
AL
MANIFO
LD
PO
SITIO
N. AD
D
FL
O
W
CON
TR
OL B
E
TW
EEN
S
O
L 3 A
N
D
S
O
L 7
9/5/2013
SVP
R2
R3
SO
L 4
PRO
C
ESS
A
SSIST
GAS
PRO
C
ESS A
SSIST SO
URC
E GA
S
BLUE-SEE N
O
TE 1
IS P
R
OHIB
IT
ED.
PNEUMATI
C SCHEMATI
C,
FO
U
R
PLACE D
E
CI
M
A
L
IP
G P
H
OT
ON
ICS M
ICR
OSY
ST
EM
S DIVISION
.
D
C
B
A
B
C
D
1
2
3
4
5
6
7
8
8
76
5
4
3
2
1
E
F
E
F
R
0081
6
SH
EET
1
O
F
1
08/20/09
08/20/09
08/20/09
PS
PS
RRH
8
U
N
LESS OT
H
E
RWISE SP
ECIF
IED:
SCA
LE: 2
:1
WEIGH
T:
RE
V
DW
G
. N
O
.
A
D
O
N
O
T S
C
AL
E
D
R
AW
IN
G
0.
005
AN
Y R
E
PR
O
D
U
C
TI
O
N
I
N
PAR
T O
R
AS
A
M
icro
sy
stems
Di
vi
sio
n
NA
M
E
DAT
E
EN
G
A
PPR.
CH
E
C
K
E
D
DRAWN
C
SIZ
E
MA
TE
RI
A
L
E
D
G
E
S
. M
A
X FL
AT 0
.0
1
0
IX
6600,
WL
W
H
O
LE
W
ITH
O
U
T TH
E
W
R
ITTE
N
PE
R
M
IS
S
IO
N
IPG
Ph
ot
on
ic
s Cor
por
at
io
n
OF
IP
G P
H
OT
ON
ICS M
ICR
OSY
ST
EM
S DIVISION
TH
REE P
LACE D
E
CI
M
A
L
TI
TL
E
:
RE
MO
V
E
A
LL B
U
RRS A
N
D
SH
A
R
P
FI
N
IS
H
0.
001
0
PR
OP
RI
ET
AR
Y AND CONF
IDE
NT
IAL
0.
01
D
IM
E
N
S
IO
N
S
A
R
E
IN
IN
C
H
E
S
TO
LE
R
A
N
C
E
S
: 63
FRACT
IO
NAL
0.
1
ANG
U
LAR
: MACH
0.
1
B
E
N
D
0.
5
O
N
E PLACE D
E
CI
M
A
L
0.
1
TW
O PL
ACE
DE
CI
MAL
TH
E IN
F
O
R
M
A
TION
CON
TA
IN
ED IN
T
H
IS
DR
AW
IN
G IS T
H
E SOL
E P
R
OP
ER
TY
OF
PLEA
SE C
A
LL (
603)
51
8-
3200
W
ITH
AN
Y
QU
E
S
TI
O
N
S
O
R
CO
N
C
E
R
N
S
.
PLEA
SE DO
N
O
T MA
KE A
SSUMPT
IO
N
S
.
IF
DRA
WIN
G
IS U
N
C
LEA
R,
C
A
LL
F
O
R
C
LA
R
IF
IC
A
TIO
N
.
Содержание IX-6168-PS
Страница 1: ...IX 6168 PS Laser Micromachining System Hardware Reference Guide...
Страница 26: ...Safety 1 20...
Страница 32: ...System Overview 2 6...
Страница 40: ...Starting and Shutting Down 3 8...
Страница 66: ...Pneumatic Components 6 10...
Страница 88: ...Electronic and Computer Components 7 22...
Страница 108: ...Ventilation and Debris Control 10 6...