Safety
1-14
Integrated Automated Platform (IAP) Wafer Handler (if
equipped)
Note:
The Integrated Automated Platform (IAP) Wafer Handler is an option that can be installed for
the IX-6168 workstation.
The electrical shutoff of the IAP's main circuit breaker is located on the AC/DC power
enclosure behind the rear door of the IX-6168-PS. Refer to Figure 69, “DC Circuit
Breaker Access,” on page 17. Figure 9 shows the IAP circuit breaker in the ON
position.
Figure 9: IAP Circuit Breaker — shown in its ON position
Содержание IX-6168-PS
Страница 1: ...IX 6168 PS Laser Micromachining System Hardware Reference Guide...
Страница 26: ...Safety 1 20...
Страница 32: ...System Overview 2 6...
Страница 40: ...Starting and Shutting Down 3 8...
Страница 66: ...Pneumatic Components 6 10...
Страница 88: ...Electronic and Computer Components 7 22...
Страница 108: ...Ventilation and Debris Control 10 6...