6
Operating in CI Mode
To Monitor CI Mode High Vacuum Pressure
166
5977B Series MSD Operating Manual
Familiarize yourself with the measurements on
your
system under operating
conditions and watch for
changes
that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
Table 16 MFC settings and typical pressure readings
MFC
Pressure (Torr)
(%)
Methane
Ammonia
EI/PCI/NCI MSD
(Turbo pump)
EI/PCI/NCI MSD
(Turbo pump)
10
5.5
×
10
–5
5.0
×
10
–5
15
8.0
×
10
–5
7.0
×
10
–5
20
1.0
×
10
–4
8.5
×
10
–5
25
1.2
×
10
–4
1.0
×
10
–4
30
1.5
×
1
–4
1.2
×
10
–4
35
2.0
×
10
–4
1.5
×
10
–4
40
2.5
×
10
–4
2.0
×
10
–4
Summary of Contents for 5977B CI MSD
Page 1: ...Agilent 5977B Series MSD Operating Manual ...
Page 12: ...12 5977B Series MSD Operating Manual ...
Page 34: ...1 Introduction To Replace the Primary Fuses 34 5977B Series MSD Operating Manual ...
Page 142: ...5 Operating in EI Mode To Pumpdown the MSD 142 5977B Series MSD Operating Manual ...
Page 252: ...8 CI Maintenance To Install the CI Source 252 5977B Series MSD Operating Manual ...
Page 253: ......