
6270A
Service Manual
70
Exhaust Port (Hard Vacuum then ATM)
1. Install the highest range PMM that you have and make it the fixed range.
2. Set the PMM measurement mode to
Absolute
.
3. Install a shutoff valve on the test port.
4. Vent the system.
5. Apply a hard vacuum to the exhaust port.
6. Type in
CAL:PRES7:VAL1 xx.xx
(xx.xx = value in units must be absolute).
For this VAL1 use 0 psi absolute
7. Vent the vacuum port and vacuum pump to ATM.
8. Use a reference barometer to read the absolute ATM pressure in the units
and type this value for VAL2 below.
9. Type
CAL:PRES7:VAL2 xx.xx
(xx.xx = value in units must be absolute).
10. Type
CAL:PRES7:SAVE
Calibration Sled and PMM
These tools are necessary to work on the calibration sled and PMMs:
•
3 mm hex
•
#2 Phillips Torque Driver
•
Loctite
TM
222 or equivalent
See Figure 42:
1. Remove Cover
.
Use a 3 mm hex torque driver to remove the (4) Mx12
SHC screws
.
2. Remove the connector bracket and cable assembly
. Use 3 mm hex torque
driver remove the (1) M4x12 SHC screw
and the (1) M4x8 SCH screw
.
3. Separate the connector bracket and cable assembly
from the manifold
.
4. Remove the PMM guide rail
.
Use a #2 Phillips torque driver, remove the
(3) M4x8 socket head screws
.
5. Remove the manifold
from the base plate
. Use a 3 mm hex torque
driver to remove the (2) M4x8 SCH screws
.
6. Remove the (4) feet
from the base plate
.
Содержание 6270A
Страница 5: ...Contents continued iii Inspect and Replace the CPS valves 122 Replacement Parts 124 Screw Torque 136...
Страница 6: ...6270A Service Manual iv...
Страница 26: ...6270A Service Manual 20 2 1 3 hxn212 eps Figure 7 PMM and PCM Removal...
Страница 30: ...6270A Service Manual 24 1 2 3 hxn205 eps Figure 9 Manifold Installation...
Страница 32: ...6270A Service Manual 26 2 1 1 hxn202 eps Figure 10 Remove Feet and Tilt Stands...
Страница 37: ...Pressure Controller Calibrator Module Guide Rails 31 1 2 3 hxn209 eps Figure 13 Remove Module Guide Rails...
Страница 40: ...6270A Service Manual 34 hxn208 eps Figure 16 Remove the CPU...
Страница 43: ...Pressure Controller Calibrator Module Guide Rails 37 8 9 10 hxn219 eps Figure 18 Dock Assembly...
Страница 47: ...Pressure Controller Calibrator Module Guide Rails 41 2 3 1 4 6 7 5 8 hxn215 eps Figure 21 Remove B Series Valve...
Страница 53: ...Pressure Controller Calibrator Power Supply and Fan 47 3 1 2 4 hxn221 eps Figure 25 Remove Power Supply...
Страница 64: ...6270A Service Manual 58 1 2 3 4 5 7 6 hxn210 eps Figure 32 Remove Latch Assembly...
Страница 67: ...Pressure Controller Calibrator PCM Assembly 61 2 1 hxn401 eps Figure 34 Module Components...
Страница 138: ...6270A Service Manual 132 9 2 5 18 7 9 8 2x 9 5x 3 4x 4 3x 7 2x 11 12 13 6 10 hxn509 eps Figure 56 PMM CAL KIT 20M Parts...