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IM 1F6A0-01E
2-18
2. GENERAL DESCRIPTION
■
High Process Temperature Version (/HT): 25mm up to 100mm
■
Cryogenic Version (/LT): 15mm up to 100mm
■
Wafer type
AJ2
49.5
24.7
13
AJ4
56.6
28.3
17
AA1
70
35
14.6
35.1
391
270
42.7
21.4
14
3.2
AA2
47.1
23.5
14
AA4
47.1
23.5
14
DY015 (15mm) Only for /LT
Only for REMOTE
TYPE
CODE
PROCESS
CONNECTION
L
B
C
D
H
H1
E
F
G
WEIGHT kg
TYPE
CODE
PROCESS
CONNECTION
L
B
C
D
H
H1
E
F
G
WEIGHT kg
TYPE
CODE
PROCESS
CONNECTION
L
B
C
D
H
H1
E
F
G
WEIGHT kg
AJ1
49.5
24.7
13
AD1
-AD4
46
23
13
515
333
485
318
157.2
93.8
50
120
72.7
68.9
82.6
76.6
72.9
78.5
70.8
67
87.8
83.1
99.7
88
92.5
94.7
85.5
80.8
21
23
23
21
17
17
17
20
20
20
21
21
17
17
17
77.7
77.7
78.5
73.9
73.9
73.9
69.3
- AD4
AD3
61.2
61.2
64.4
64.4
65.1
61.2
57.4
127
71
40
100
DY080 (80mm) /LT, /HT
AA4
AA2
AA1
AJ4
AJ2
AJ1
- AD2
AD1
AA4
AA2
AA1
AJ4
AJ2
AJ1
DY100 (100mm) /LT, /HT
AD1
- AD2
AD3
- AD4
AJ1
AJ2
AJ4
AA1
AA2
AA3
AD1
- AD4
AJ1
AJ2
AJ4
AA1
AA2
AA3
AD1
- AD4
DY040 (40mm) /LT, /HT
70
39.7
73
74.2
74.2
84.9
69.7
80.8
80.8
77.8
37.1
37.1
42.4
34.8
40.4
40.4
38.9
17
17
17
21
14
20
20
DY050 (50mm) /LT, /HT
45.9
49.8
48.6
48.6
55.4
60.1
58.7
58.7
17
17
17
17
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
75
92
51.1
301
450.5
279
419
AJ1
AJ2
AJ4
AA1
AA2
AA4
AD1
- AD4
DY025 (25mm) /LT, /HT
17
17
17
17
17
14
13
31.8
31.8
33.6
28
31.4
31.4
30.1
63.6
63.6
67.2
56
62.9
62.9
60.1
70
25.7
50.8
272
401
Only for REMOTE
Only for REMOTE
4.1
4.7
6.4
13.2
9.8
F020604.EPS
(Note 1) The hole is not provided.
Unit: mm
35
35
37.5
H1
103.5
B
H
125
L
φ
D
φ
C
2-
φ
G
4.5
59
59
φ
94
F
E
87.5
ELECTRICAL
CONNECTION
CLAMP
ONLY FOR JIS,
KEMA, SAA
EXPLOSION
PROOF
EARTH
TERMINAL