YOKOGAWA AE100D, Instruction Manual

Page: 121 / 464

10. OUTLINE
IM 1E7B0-02E 10-11
250 to 300mm(10 to 12in.) Wafer Type
25 to 50mm(1 to 2in.) Flange Type
ø
D
*230(9.1)
30(1.2) *40(1.6)
**L
54(2.1)
49(1.9)
147(5.8)
Ground
Terminal
W
ø 123(4.8)
H1
H
H2
80(3.1) 80(3.1)
15mm(0.5in.) Flange Type
Unit: mm
(approx. inch)
*230 (9.1)
80 (3.1) 80 (3.1)
30 (1.2)
*40 (1.6)
ØD
ØC
4-Øh
72
Ground
terminal
147 (5.8)
49 (1.9)
54 (2.1)
**200 (7.9)
***T
Ø123
(4.8)
****H1
****H
66
(2.6)
58 (2.3)
4-Ø5.8 (0.2)
* The length marked as * is shorter by approx. 10mm(0.4 in.) for non indicator type.
** The face-to-face length is longer by approx. 22mm(0.87 in.) for earth ring P, T.
*** The thickness (T) is longer by approx. 11mm(0.43 in.) for earth ring P, T.
** The face-to-face length is shorter by approx. 6mm(0.24 in.) for non earth ring type.
*** The thickness (T) is shorter by approx. 3mm(0.12 in.) for non earth ring type.
** The face-to-face length is longer by approx. 2mm(0.08 in.) for optional code/FRG.
*** The thickness (T) is longer by approx. 1mm(0.04 in.) for optional code/FRG.
**** The height is shorter by approx. 2.5mm(0.1 in.) for ex-proof type.
AE115
MG
MN
SC
-A
J
A
D
Type
Size code
Size
Lining
115
15 (0.5)
A (PFA)
Process connection
95 (3.7)
19
to
24
(0.7
to
0.9)
21
to
26
(0.8
to
1.0)
18
to
25
(0.7
to
1.0)
21
to
28
(0.8
to
1.1)
20
to
26
(0.8
to
1.0)
70 (2.8)
15 (0.6)
6.3 (13.9)
95 (3.7)
70 (2.8)
15 (0.6)
6.5 (14.3)
88.9 (3.5)
60.5 (2.4)
15.7 (0.6)
6.1 (13.4)
95.3 (3.8)
66.5 (2.6)
15.7 (0.6)
6.5 (14.3)
95 (3.7)
65 (2.6)
14 (0.6)
6.5 (14.3)
Height
Height
****H
****H1
D
***T
J1 J2 A1
General (MG),
267.5 (10.5)
127.5 (5.0)
A2 D2
Ex-proof (MN/SC)
C
h Dia. of hole
Weight kg (lb)
Outer diameter
Pitch circle dia.
Thickness
Process connection : J1;JIS10K J2;JIS20K A1;ANSI 150 A2;ANSI 300 D2;DIN PN16
D4;DIN PN40
22
to
28
(0.9
to
1.1)
95 (3.7)
65 (2.6)
14 (0.6)
6.5 (14.3)
D4
Lining code A : PFA lining
U : Polyurethane rubber lining
Type
Size code
Size
Lining
325
250 (10)
300
300 (12)
Height
Height
Height
Width
Face-to-face
length
Outer
diameter
**L
D
300 (11.8)
310 (12.2)
502(19.8)
362 (14.3)
207 (8.1)
366 (14.4)
35.3 (77.8)
550 (21.7)
410 (16.1)
231 (9.1)
415 (16.3)
44.6(98.3)
350 (13.8)
358 (14.1)
H
H1
H2
W
Weight kg (lb)
General (MG)
A, U
AE
MG -
325
300 A
U
K
B
E
H
* The length marked as * is shorter by approx. 10mm(0.4 in.)
for non indicator type.
** The face-to-face length is shorter by approx. 2mm(0.08 in.)
for non earth ring type.
* The length marked as * is shorter by approx. 10mm(0.4 in.) for non indicator type.
** The face-to-face length is longer by approx. 22mm(0.87 in.) for earth ring P, T.
*** The thickness (T) is longer by approx. 11mm(0.43 in.) for earth ring P, T.
** The face-to-face length is shorter by approx. 6mm(0.24 in.) for non earth ring type.
*** The thickness (T) is shorter by approx. 3mm(0.12 in.) for non earth ring type.
** The face-to-face length is longer by approx. 2mm(0.08 in.) for optional code / FRG.
*** The thickness (T) is longer by approx. 1mm(0.04 in.) for optional code /FRG.
**** The height is shorter by approx. 2mm(0.08 in.) for ex-proof type.
30
(1.2)
80 (3.1) 80 (3.1)
Ground
terminal
N-Øh
ØC
ØD
Ø123
(4.8)
*230 (9.1)
*40
(1.6)
49 (1.9)
54 (2.1)
**200 (7.9)
***T
147 (5.8)
****(H2)
****H1
****H
␪⬚
Unit: mm
(approx. inch)
AE
A
U
MG
MN
SC
202
204
205 J
A
D
Size code
Size
Lining
Process
connection
202
25(1.0)
A(PFA), U(Polyurethane)
204
40(1.5)
A(PFA), U(Polyurethane)
205
50(2.0)
A(PFA), U(Polyurethane)
J1
76.8(3.0) 87(3.4) 94(3.7)
279.3
(11.0)
J2 A1 A2 D2 J1 J2 A1 A2 D2 J1 J2 A1 A2 D2
Height
Height
Height
Weight kg (lb)
Outer
diameter
D
Thickness
Dia. of hole
Number of
holes
Pitch circle
dia.
*** T
h
N
C
-
139.3
(5.5)
125
(4.9)
90
(3.5)
19
(0.7)
4
7.5
(16.5)
21(0.8)
to
26(1.0)
125
(4.9)
90
(3.5)
19
(0.7)
4
7.8
(17.2)
23(0.9)
to
28(1.1)
108
(4.3)
79.2
(3.1)
15.7
(0.6)
4
6.9
(15.2)
21(0.8)
to
28(1.1)
124
(4.9)
88.9
(3.5)
19.1
(0.8)
4
7.5
(17.4)
25(1.0)
to
31(1.2)
115
(4.5)
85
(3.3)
14
(0.6)
4
7.4
(16.3)
22(0.9)
to
28(1.1)
140
(5.5)
105
(4.1)
19
(0.7)
4
9.7
(21.4)
23(0.9)
to
28(1.1)
140
(5.5)
105
(4.1)
19
(0.7)
4
10.0
(22.0)
25(1.0)
to
30(1.2)
127
(5.0)
98.6
(3.9)
15.7
(0.6)
4
9.3
(20.5)
25(1.0)
to
31(1.2)
155.4
(6.1)
114.3
(4.5)
22.4
(0.9)
4
11.5
(25.3)
28(1.1)
to
34(1.3)
150
(5.9)
110
(4.3)
18
(0.7)
4
10.3
(22.7)
22(0.9)
to
28(1.1)
155
(6.1)
120
(4.7)
19
(0.7)
4
11.3
(24.9)
23(0.9)
to
29(1.1)
155
(6.1)
120
(4.7)
19
(0.7)
8
11.4
(25.1)
25(1.0)
to
31(1.2)
152.4
(6.0)
120.7
(4.8)
19.1
(0.7)
4
11.7
(25.8)
26(1.0)
to
33(1.3)
165.1
(6.5)
127
(5.0)
19.1
(0.7)
8
13.1
(28.9)
30(1.2)
to
37(1.5)
165
(6.5)
125
(4.9)
18
(0.7)
4
12.5
(27.5)
24(0.9)
to
30(1.2)
279.3
(11.0)
139.3
(5.5)
270.8
(10.7)
130.8
(5.1)
278.8
(11.0)
138.8
(5.5)
274.3
(10.8)
134.3
(5.3)
297
(11.7)
157
(6.2)
297
(11.7)
157
(6.2)
290.5
(11.4)
150.5
(5.9)
304.7
(11.0)
164.7
(6.5)
302
(11.9)
162
(6.4)
311.5
(12.3)
171.5
(6.8)
311.5
(12.3)
171.5
(6.8)
310.2
(12.2)
170.2
(6.7)
316.6
(12.5)
176.6
(7.0)
316.5
(12.5)
176.5
(6.9)
D4
115
(4.5)
85
(3.3)
14
(0.6)
4
7.4
(16.3)
24(0.9)
to
30(1.2)
274.3
(10.8)
134.3
(5.3)
D4
150
(5.9)
110
(4.3)
18
(0.7)
4
10.3
(22.7)
24(0.9)
to
30(1.2)
302
(11.9)
162
(6.4)
D4
165
(6.5)
125
(4.9)
18
(0.7)
4
12.5
(27.5)
26(1.0)
to
33(1.3)
316.5
(12.5)
176.5
(6.9)
****
****
****
H
H1
H2
Process Connection: J1;JIS10K J2;JIS20K A1;ANSI 150 A2;ANSI 300 D2;DIN PN16 D4;DIN PN40 F14.EPS