IM 1F6A0-01E
2-15
2. GENERAL DESCRIPTION
2.6 External Dimensions
■
Wafer type (15mm up to 100mm)
6.0
4.3
AJ1
AJ2
AJ4
AA1
AA2
AA4
AD1
- AD4
AJ1
AJ2
AJ4
AA1
AA2
AP4
AA4
AD1
- AD4
70
39.7
73
74.2
74.2
84.9
69.7
80.8
80.8
77.8
37.1
37.1
42.4
34.8
40.4
40.4
38.9
17
17
17
21
14
20
20
45.9
49.8
48.6
48.6
55.4
60.1
58.7
58.7
17
17
17
17
75
35
37.5
92
51.1
158
307.5
136
276
12.8
9.4
372
190
342
175
157.2
93.8
50
120
72.7
68.9
82.6
76.6
72.9
78.5
70.8
67
87.8
83.1
99.7
88
92.5
94.7
85.5
80.8
21
23
23
21
17
17
17
20
20
20
21
21
17
17
17
77.7
77.7
78.5
73.9
73.9
73.9
69.3
- AD4
AD3
61.2
61.2
64.4
64.4
65.1
61.2
57.4
127
71
40
100
DY080 (80mm)
AA4
AA2
AA1
AJ4
AJ2
AJ1
- AD2
AD1
AA4
AA2
AA1
AJ4
AJ2
AJ1
DY100 (100mm)
AD1
- AD2
AD3
- AD4
INTEGRAL/REMOTE
(Note 1) Integral weight is the same as Remote.
(Note 2) In case of with Indicator, add 0.2kg.
(Note 3) The hole is not provided.
F020601.EPS
3.7
2.8
258
129
50.8
25.7
70
60.1
62.9
62.9
56
67.2
63.6
63.6
30.1
31.4
31.4
28
33.6
31.8
31.8
13
14
17
17
17
17
17
DY025 (25mm)
17
14
14
14
13
13
13
23
23.5
23.5
21.4
28.3
24.7
24.7
46
47.1
47.1
42.7
56.6
49.5
49.5
127
35.1
248
14.6
70
35
35
DY015 (15mm)
- AD4
AD1
AA4
AA2
AA1
AJ4
AJ2
AJ1
- AD4
AD1
AA4
AA2
AA1
AJ4
AJ2
AJ1
G
F
E
H1
H
D
C
L
PROCESS
CONNECTION
B
INTEGRAL/REMOTE
TYPE
L
C
D
H
H1
E
F
G
DY040 (40mm)
DY050 (50mm)
B
INTEGRAL/REMOTE
B
G
F
E
H1
H
D
C
L
CODE
TYPE
CODE
PROCESS
CONNECTION
TYPE
CODE
PROCESS
CONNECTION
WEIGTH kg
WEIGTH kg
WEIGTH kg
Unit: mm
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
(Note 3)
103.5
H1
H
125
L
φ
D
87.5
B
φ
C
2-
φ
G
74
φ
94
59
4.5
F
E
59
ELECTRICAL
CONNECTION
CLAMP
ONLY FOR JIS,
KEMA, SAA
EXPLOSION
PROOF
WITH INDICATOR
EARTE
TERMINAL